Detection device for angle of cut surface of single crystal silicon rod and square opening machine

Abstract

The invention discloses a detection device for an angle of a cut surface of a single crystal silicon rod and a square opening machine. The square opening machine comprises a square opening machine body and the detection device for the angle of the cut surface of the single crystal silicon rod. The detection device for the angle of the cut surface of the single crystal silicon rod comprises a distance measuring sensor, a mounting pedestal and a translation driving mechanism. The mounting pedestal is installed on a clamping base of a clamping mechanism and is located below the single crystal silicon rod held by the clamping mechanism. The translation driving mechanism is used for driving movement of the distance measuring sensor. The distance measuring sensor is connected to the translationdriving mechanism, and is arranged vertically upward toward the single crystal silicon rod. After the central axis of the single crystal silicon rod is aligned with the clamping mechanism, the distance measuring sensor collects a first distance data. After the translation driving mechanism drives the distance measuring sensor to move a certain distance, the distance measuring sensor collects a second distance data. If the first distance data is inconsistent with the second distance data, the angle of the single crystal silicon rod needs to be adjusted. The detection device of the invention hasthe advantage of detecting whether the cut surface of the single crystal silicon rod is horizontal.

Description

technical field [0001] The invention relates to the field of brittle and hard material cutting, in particular to a single crystal silicon rod cutting surface angle detection device and a squarer. Background technique [0002] The existing monocrystalline silicon rod squarer is provided with a tail-end clamping mechanism and a front-end clamping mechanism for clamping a single crystal silicon rod, and sensors are arranged below them, and the sensors are vertical sensors, and the tail-end clamping mechanism And the front-end clamping mechanism can drive the single crystal silicon rod to rotate along its central axis. After the single crystal silicon rotates one circle, the sensor can scan the shape characteristics of the single crystal silicon rod. The control system can obtain the shape characteristics of the single crystal silicon rod. The position of the central axis provides information for the alignment of the crystal lines. [0003] After the crystal line of the single ...

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Problems solved by technology

[0004] For this reason, it is necessary to provide a single crystal silicon rod cutting surface angle detection device and a squarer to solve the problem that in the prior art, the squarer directly performs the next cut after completing one cut and rotating the single crystal silicon rod, resulting in two The problem of the large deviation of the perpendicularity of the cutting surface of the secondary cutting

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