Air floatation platform performance design method based on height-width ratio factor influence

Abstract

The invention discloses an air floatation platform performance optimization design method based on height-width ratio factor influence, and the method comprises the steps: 1), obtaining related information data, so as to determine a vibration design demand; 2) determining a preliminary design scheme according to engineering design experience and the design requirements; 3) calculating the mass ratio of the air floatation platform to the upper equipment, and when the mass ratio belongs to [1.5-5], calculating the height-width ratio of the upper equipment and the height-width ratio of the air floatation platform, and then executing the step 4); otherwise, returning to the step 2) to modify the preliminary design scheme; 4) comparing the height-width ratio of the air floatation platform withthe height-width ratio of the upper equipment, when the ratio of the height-width ratio of the air floatation platform to the height-width ratio of the upper equipment is not less than 1 and not morethan 1.5, performing the next step 5), otherwise, returning to the step 2) to modify the preliminary design scheme; 5) performing parameterized fine modeling based on the design scheme after the step4), and 6) carrying out time-frequency domain analysis, and finally determining an optimization design scheme.

Description

technical field [0001] The invention relates to the technical field of air flotation and vibration isolation, in particular to a performance-based design method of an air flotation platform based on the influence of aspect ratio factors. Background technique [0002] At present, in order to solve the problem of high performance of mass rigid coincidence of air flotation platform, the empirical design method of air flotation platform and the design method of finite element calculation are mainly adopted. However, due to the limitation and non-specificity of the empirical design method, the upper The equipment and the lower air flotation platform cannot effectively protect precision instruments and reduce micro-vibration with stable performance. The disadvantages of traditional methods are as follows: [0003] (1) Limitation and non-targeting. The empirical design method of the air flotation platform is a general design method summarized in actual engineering tests. The desi...

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Problems solved by technology

The empirical design method of the air flotation platform is a general design method summarized in actual engineering tests. The design of the air flotation platform for different or professional strength requirements cannot make the upper equipment reach the proper vibration range. affect the normal operation of the equipment

[0004] (2) It is difficult to coincide with the center of mass and the center of stiffness

The study found that when the center of mass and the center of stiffness of the air-floating platform are coincident, the vibration received is the smallest, and it is difficult to accurately achieve mass-rigid coincidence with empirical design methods

[0005] (3) Large amount of calculation, long time-consuming, high engineering cost

Existing methods can calculate a large amount of data to obtain accurate values. Due to the limitation of finite elements, the calculations are tedious and numerous, and the non-quantified data consumes a long time. The calculation of a large number of man-hours has a high design cost, and it cannot be done in a short time. The data and plans are obtained within the project, and the project lags behind

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