Method for detecting surface figures of large-aperture off-axis convex aspheric mirror
A detection method and technology of reflecting mirror surface, which can be used in measuring devices, instruments, and optical devices, etc., and can solve the problems of difficulty in implementation, complex structure, and large diameter of compensator.
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[0043] like figure 1 As shown, the device for realizing the large-diameter off-axis convex aspheric mirror surface shape detection method of the present invention includes a laser interferometer 1, a calculation holographic element 2, a first adjustment mechanism 3, a second adjustment mechanism 4, a third adjustment mechanism 5 and Large-diameter off-axis convex aspheric surface 6 to be tested.
[0044] The first adjustment mechanism 3 adopts a currently known three-dimensional precision adjustment frame, which can accurately control the translation of the interferometer 1 along the X direction, the Y direction and the Z direction (optical axis direction). The second adjustment mechanism 4 adopts a currently known six-dimensional precision adjustment frame, which can accurately adjust the pitch, yaw, and rotation of the computational holographic element 2, as well as the translation along the X direction, Y direction, and Z direction (optical axis direction). The third adjus...
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