Low coercivity rare earth-fe-b composite film with skyrmion structure and preparation method
A technology of skyrmion structure and composite thin film, which is applied in the fields of magnetic thin film, magnetic film to substrate application, inductor/transformer/magnet manufacturing, etc.
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preparation example Construction
[0044] Specifically, the preparation method, the method includes the following steps:
[0045] 1) Target Nd in the sample a-x (RE 1 x )Fe b-y (M y )B bal and Ce a-x (RE 2 x )Fe b-y (M y )B bal Prepare the raw materials according to the chemical formula, put the prepared raw materials into the electric arc furnace, vacuumize, clean with argon, and melt under the protection of argon.
[0046] 2) Cutting the alloy ingot smelted in step 1) into targets of required size.
[0047] 3) Carry out sputtering at temperatures of 630-670° C. and 610-650° C. respectively, grow and form films on the Si substrate, and separate different layers with isolation layers. where Nd a-x (RE 1 x )Fe b-y (M y )B bal Layer, Ce a-x (RE 2 x )Fe b-y (M y )B bal The layer growth thickness is 20-100nm, and the isolation layer thickness is 2-10nm.
[0048] A buffer layer is provided between the Si substrate and the target layer, and the buffer layer is Ta with a thickness of 50 nm.
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Embodiment 1
[0059] The target composition of the composite film is Nd 15 (RE 1 0 )Fe 75 (M 0 )B 10 -Ce 15 (RE2 0 )Fe 75 (M 0 )B 10 . The tempering condition in the preparation process is tempering at 675°C for 5 minutes.
[0060] The multilayer structure of the composite film and the thickness (nm) of each layer are: Si / Ta(50) / NdFeB(100) / Ta(10) / CeFeB(100) / Ta(40).
Embodiment 2
[0062] The target composition of the composite film is Nd 25 (Dy 5 )Fe 60 (M 0 )B 10 -Ce 25 (Dy 5 )Fe 60 (M 0 )B 10 . Tempering conditions during its preparation: tempering at 680°C for 30 minutes.
[0063] The multilayer structure of the composite film and the thickness (nm) of each layer are: Si / Ta(50) / NdFeB(20) / Ta(5) / CeFeB(100) / Ta(5)NdFeB(20) / Ta( 40).
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