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Low coercivity rare earth-fe-b composite film with skyrmion structure and preparation method

A technology of skyrmion structure and composite thin film, which is applied in the fields of magnetic thin film, magnetic film to substrate application, inductor/transformer/magnet manufacturing, etc.

Active Publication Date: 2021-01-05
CENT IRON & STEEL RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, there are still many problems to be solved, such as the process of generation and annihilation of magnetic skyrmions, helicity reversal, three-dimensional magnetic skyrmion structure, etc.

Method used

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  • Low coercivity rare earth-fe-b composite film with skyrmion structure and preparation method
  • Low coercivity rare earth-fe-b composite film with skyrmion structure and preparation method
  • Low coercivity rare earth-fe-b composite film with skyrmion structure and preparation method

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Experimental program
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Effect test

preparation example Construction

[0044] Specifically, the preparation method, the method includes the following steps:

[0045] 1) Target Nd in the sample a-x (RE 1 x )Fe b-y (M y )B bal and Ce a-x (RE 2 x )Fe b-y (M y )B bal Prepare the raw materials according to the chemical formula, put the prepared raw materials into the electric arc furnace, vacuumize, clean with argon, and melt under the protection of argon.

[0046] 2) Cutting the alloy ingot smelted in step 1) into targets of required size.

[0047] 3) Carry out sputtering at temperatures of 630-670° C. and 610-650° C. respectively, grow and form films on the Si substrate, and separate different layers with isolation layers. where Nd a-x (RE 1 x )Fe b-y (M y )B bal Layer, Ce a-x (RE 2 x )Fe b-y (M y )B bal The layer growth thickness is 20-100nm, and the isolation layer thickness is 2-10nm.

[0048] A buffer layer is provided between the Si substrate and the target layer, and the buffer layer is Ta with a thickness of 50 nm.

...

Embodiment 1

[0059] The target composition of the composite film is Nd 15 (RE 1 0 )Fe 75 (M 0 )B 10 -Ce 15 (RE2 0 )Fe 75 (M 0 )B 10 . The tempering condition in the preparation process is tempering at 675°C for 5 minutes.

[0060] The multilayer structure of the composite film and the thickness (nm) of each layer are: Si / Ta(50) / NdFeB(100) / Ta(10) / CeFeB(100) / Ta(40).

Embodiment 2

[0062] The target composition of the composite film is Nd 25 (Dy 5 )Fe 60 (M 0 )B 10 -Ce 25 (Dy 5 )Fe 60 (M 0 )B 10 . Tempering conditions during its preparation: tempering at 680°C for 30 minutes.

[0063] The multilayer structure of the composite film and the thickness (nm) of each layer are: Si / Ta(50) / NdFeB(20) / Ta(5) / CeFeB(100) / Ta(5)NdFeB(20) / Ta( 40).

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Abstract

The invention belongs to the field of preparation of rare earth permanent magnet films, and particularly relates to a low-coercivity rare earth-Fe-B composite film with a skyrmion structure and a preparation method. The composite film is one of X / Y, X / Y / X and Y / X / Y multilayer structures, X and Y are magnetic layers, the components of the X and Y are Nd (RE1) Fe (M) B and Ce (RE2) Fe (M) B respectively, and the composite film is prepared by adopting a magnetron sputtering mode; an isolation layer is arranged between every two adjacent magnetic layers; the composite film has a spontaneously formed skyrmion structure. According to the preparation method, the neodymium iron boron film and the cerium iron boron film are sputtered for several times through magnetron sputtering, and the films ofthe two components form a multi-layer structure; and carrying out tempering treatment to obtain the composite film with low coercive force and spontaneously formed skyrmion structure. The film material has a wide application prospect in the fields of micro-magnetic materials, electric control magnetic recording and magnetic storage.

Description

technical field [0001] The invention belongs to the field of preparation of rare earth permanent magnet thin films, and in particular relates to a rare earth-Fe-B composite thin film with skyrmion structure and low coercivity and a preparation method. Background technique [0002] The intense competition among various energies in magnets leads to nonlinear or non-coplanar spin structures, including vortices, domain walls, bubbles, and helices. Since Tony skyrme predicted the existence of skyrmions in 1962, skyrmions have been developed and applied in many fields, such as quantum Hall ferromagnets, monomolecular layer ferromagnets, doped layer antiferromagnets, liquid crystals, Bose- Einstein Condensation et al. The long-range magnetic dipole interaction in centrosymmetric magnets is one of the mechanisms for the generation of four types of skyrmions. It is mainly due to the magnetocrystalline anisotropy that makes the magnetic moment perpendicular to the membrane surface an...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01F10/12H01F10/30H01F10/28H01F41/02H01F41/18
CPCH01F10/126H01F10/28H01F10/30H01F41/0253H01F41/18
Inventor 朱明刚郭英健孙亚超李卫
Owner CENT IRON & STEEL RES INST