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Double-rotation combined crank

A combined, double-rotation technology, used in electrical components, semiconductor/solid-state device manufacturing, circuits, etc., can solve the problems of wafer impact, unstable motion, extrusion, etc., and achieve stable crank rotation, simple structure, and convenient use. Effect

Pending Publication Date: 2020-03-27
ULTRON SEMICON (SHANGHAI) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the current wafer guide mechanism is unstable when exchanging wafers, and it is easy to cause impact, abrasion, extrusion, etc. on the wafer, thus causing the wafer to be damaged

Method used

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  • Double-rotation combined crank
  • Double-rotation combined crank
  • Double-rotation combined crank

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Embodiment Construction

[0025] In order to better understand the technical solutions of the present invention, the embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0026] It should be clear that the described embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0027] The present application will be described in further detail below through specific embodiments and in conjunction with the accompanying drawings.

[0028] In the description of this application, unless otherwise clearly specified and limited, the terms "first" and "second" are only used for the purpose of description, and cannot be understood as indicating or implying relative importance; unless otherwise specified or stated , ...

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Abstract

The invention discloses a double-rotation combined crank which comprises an upper crank and a lower crank, the upper crank is provided with a groove and a first rotating groove used for embedding a rotating bearing, and the bottom of the groove is provided with a stop groove; a stop hole is formed in the end face of one end of the lower crank, a protruding part is arranged on the end face of the other end of the lower crank, a second rotating groove used for allowing the rotating bearing to be embedded is formed in the protruding part, the lower crank is buckled in the groove, and the protruding part of the lower crank abuts against the end face of the upper crank. According to the invention, the upper crank and the lower crank are buckled and fixed into the combined crank, so that the influence of synchronous rotating torque generated between the lower crank and the upper crank on the deflection of the cranks during the rotation of the cranks can be reduced, the rotation of the cranksis more stable, and wafers can be stably and safely conveyed.

Description

technical field [0001] The invention relates to the technical field of semiconductor processing, in particular to a double-rotation combined crank. Background technique [0002] In semiconductor process equipment, taking wet equipment as an example, wafer support baskets need to be exchanged between the wafer loading area and the wafer unloading area. In the process of exchanging wafer baskets, it is necessary to use the wafer guide mechanism to take out the wafers in one wafer basket and place them in another wafer basket. However, the current wafer guide mechanism is unstable when exchanging wafers, and it is easy to cause impact, abrasion, extrusion, etc. on the wafer, thus causing the wafer to be damaged. Contents of the invention [0003] In view of this, the present invention provides a double-rotation combined crank to solve the above-mentioned problems in the background technology. [0004] A double-rotation combined crank, including an upper crank and a lower cr...

Claims

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Application Information

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IPC IPC(8): H01L21/677
CPCH01L21/67766H01L21/67778
Inventor 徐铭王雪松李志峰陈佳炜
Owner ULTRON SEMICON (SHANGHAI) CO LTD