Cryogenic Sample Holder

Abstract

The invention provides a low-temperature sample holder, which is located in a vacuum chamber and at least includes: an electric movement mechanism, a refrigeration device and a three-dimensional movement device; wherein, the electric movement mechanism is used to drive the sample relative to the The refrigeration device moves, the refrigeration device is used to realize the cryogenic temperature of the sample, and the three-dimensional moving device is used to realize the three-dimensional movement of the refrigeration device and the electric moving mechanism relative to the vacuum chamber. The low-temperature sample holder of the present invention moves the sample relative to the vacuum chamber through electric drive, and realizes the low-temperature temperature of the sample, and the heat conduction between the electric movement mechanism and the external room temperature environment only includes the heat conduction channel composed of alloy wires, which effectively reduces the The thermal conductivity of the heat transfer channel between the cryogenic part and the ambient room temperature environment, thus enabling lower sample temperatures, lower risk of vacuum leaks and more compact and smaller structures.

Description

technical field [0001] The invention relates to the field of cryogenic refrigeration, in particular to a low-temperature sample holder. Background technique [0002] Low temperature is an important physical environment, which is of great significance to scientific research and application. The current vacuum low-temperature sample holder uses a mechanical transmission device to connect with the motion control unit at room temperature outside the vacuum chamber to complete the rotation of the sample and uses differentially pumped rotary seals (DPRS, Differentially pumped rotary seals) to realize the relative vacuum of the sample holder. overall rotation. Such a design has two disadvantages. One, the device is huge and complex, and there is a danger of vacuum leakage. Second, due to the mechanical transmission device, there is a heat transfer channel with a large thermal conductivity between the internal low-temperature components of the vacuum chamber and the external high...

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Problems solved by technology

[0003] In view of the above-mentioned shortcomings of the prior art, the object of the present invention is to provide a low-temperature sample holder, which is used to solve the problem of large and complex devices in the prior art, the danger of vacuum leakage, and the gap between the internal low-temperature components and the external room temperature environment. The heat transfer channel with a large thermal conductivity is not easy to achieve a lower sample temperature

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