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Low-temperature sample support

A sample support and low temperature technology, applied in heating or cooling equipment, laboratory appliances, supporting appliances, etc., can solve the problems of large and complex devices, low sample temperature, and difficulty in realization, and achieve reduced thermal conductivity and low sample temperature , The effect of reducing the risk of vacuum leakage

Active Publication Date: 2020-04-07
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] In view of the above-mentioned shortcomings of the prior art, the object of the present invention is to provide a low-temperature sample holder, which is used to solve the problem of large and complex devices in the prior art, the danger of vacuum leakage, and the gap between the internal low-temperature components and the external room temperature environment. The heat transfer channel with a large thermal conductivity is not easy to achieve a lower sample temperature

Method used

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Embodiment Construction

[0052]Embodiments of the present invention are described below through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific implementation modes, and various modifications or changes can be made to the details in this specification based on different viewpoints and applications without departing from the spirit of the present invention.

[0053] see Figure 1 to Figure 4 . It should be noted that the diagrams provided in this embodiment are only schematically illustrating the basic idea of ​​the present invention, and only the components related to the present invention are shown in the diagrams rather than the number, shape and shape of the components in actual implementation. Dimensional drawing, the type, quantity and proportion of each component can be changed at w...

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Abstract

The invention provides a low-temperature sample support. The low-temperature sample support is positioned in a vacuum cavity and at least comprises an electric movement mechanism, a refrigerating device and a three-dimensional moving device, wherein the electric movement mechanism is used for enabling a sample to move relative to the refrigerating device under the driving of electricity; the refrigerating device is used for achieving a low temperature of the sample; and the three-dimensional moving device is used for achieving three-dimensional movement of the refrigerating device and the electric movement mechanism relative to the vacuum cavity. According to the low-temperature sample support in the invention, the sample is electrically driven to move relative to the vacuum cavity, the low temperature of the sample is realized, and heat conduction between the electric movement mechanism and an external room temperature environment is achieved only by a heat conduction channel formed by an alloy wire, so the heat conductivity of the heat conduction channel between a low-temperature part and the external room temperature environment is effectively reduced; and therefore, lower sample temperature, lower vacuum leakage risks and more compact and smaller structure can be realized.

Description

technical field [0001] The invention relates to the field of cryogenic refrigeration, in particular to a low-temperature sample holder. Background technique [0002] Low temperature is an important physical environment, which is of great significance to scientific research and application. The current vacuum low-temperature sample holder uses a mechanical transmission device to connect with the motion control unit at room temperature outside the vacuum chamber to complete the rotation of the sample and uses differentially pumped rotary seals (DPRS, Differentially pumped rotary seals) to realize the relative vacuum of the sample holder. overall rotation. Such a design has two disadvantages. One, the device is huge and complex, and there is a danger of vacuum leakage. Second, due to the mechanical transmission device, there is a heat transfer channel with a large thermal conductivity between the internal low-temperature components of the vacuum chamber and the external high...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01L7/00B01L9/00
CPCB01L7/00B01L9/00
Inventor 乔山
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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