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A control method applied to automatic board loading of lithography machine

A control method and technology of a lithography machine, which are applied in the directions of optomechanical equipment, microlithography exposure equipment, and patterned surface photoengraving process, etc., can solve problems such as low efficiency, and achieve the effect of saving costs and improving production efficiency.

Active Publication Date: 2021-11-05
湖南印之明智能制造有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In order to solve the above problems, the present invention provides a control method applied to the automatic plate loading of photolithography machines, which can solve the problem of low efficiency in the background technology

Method used

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  • A control method applied to automatic board loading of lithography machine
  • A control method applied to automatic board loading of lithography machine

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Embodiment Construction

[0019] see figure 1 As shown, the present invention relates to a control method applied to automatic loading of lithography machines, which is characterized in that it includes:

[0020] At least one lithography machine and one host, controlled and executed by the host, is a control method for controlling the execution part in the lithography machine and controlling the loading and unloading of at least one upper plate assembly or lower plate assembly in the lithography machine. The control method have:

[0021] A step of determining whether multiple upper board assemblies or lower board assemblies are transmitted within a predetermined time;

[0022] In the case of judging that multiple upper board components are transported within a predetermined time, the step of judging whether each execution unit outputs at the same time point;

[0023] If it is determined that each executing unit outputs at the same time point, the host performs a driving process on each lower plate as...

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Abstract

The present invention relates to the field of exposure equipment, in particular to a control method applied to the automatic board loading of a lithography machine. The control method has the ability to record and compare the time points output by the execution unit, and the lithography machine is controlled by a host. Then, the host By applying the control method of the present invention to implement time-division multiplexing, multiple photolithography machines are simultaneously controlled, thereby saving costs and improving production efficiency.

Description

technical field [0001] The invention relates to the field of exposure equipment, in particular to a control method applied to automatic loading of a photolithography machine. Background technique [0002] After searching, it was found that the lithography process is the core process of integrated circuit chip manufacturing, and the lithography machine equipment can be divided into three types: inner drum type lithography machine, outer drum type lithography machine and platform type according to the mechanical structure mode. [0003] Patent No. 201910522206.3 The patent name is a curved surface lithography machine, including a frame, an X-direction movement module, a Y-direction movement module, a Z-direction encoding plate, a lithography lens, and a connecting mechanism; the X-direction movement module is installed on In the rack, the Y-direction movement module is located above the X-direction movement module, and the X-direction movement module drives the Y-direction mov...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/20
CPCG03F7/70491G03F7/70691
Inventor 王泽明朱勤邓超略黄文斌高尊虎
Owner 湖南印之明智能制造有限公司