Open mask sheet for thin film deposition and method for manufacturing thereof

Abstract

The invention relates to an open mask sheet for a thin film process and a method for manufacturing the same. The open mask sheet for a thin film process includes at least one opening portion formed ona metal sheet having a predetermined thickness, the opening portion including: a basin-shaped recess etched from an upper surface toward a lower side of the metal sheet, the basin-shaped recess having a first width and a first depth; an upper groove formed by etching from the surface of the basin-shaped recess toward the lower side and having a second width and a second depth smaller than the first width; and a lower groove which is etched from the lower surface of the metal sheet toward the upper side, communicates with the upper groove, and has a third width and a third depth, in which a basin-shaped recess is formed by etching, and then the upper groove and the lower groove are etched at the same time to form a through hole between the surface of the basin-shaped recess and the lower surface of the metal sheet. According to the invention, disqualification and shadow phenomena in the edge of the film layer can be minimized.

Description

technical field [0001] The present invention relates to an open mask sheet for a thin film process, and in more detail, to a novel open mask sheet for a thin film process and a manufacturing method thereof: In the open mask sheet for a thin film process, the size determination line of the opening is horizontal The direction is separated from the edge of the substrate film layer, and the vertical direction is separated from the surface of the substrate film layer by a sufficiently small distance, which can make the edge of the substrate film layer manufactured by opening the opening of the mask sheet. and shadowing are minimized. Background technique [0002] Recently, organic light-emitting diodes (OLEDs, Organic Light-Emitting Diodes) that have been widely produced are generally used as displays for TVs, monitors for personal computers (PCs), tablets, smartphones, smart watches, and vehicle dashboards. An organic light emitting diode is a thin film light emitting diode in ...

AI Technical Summary

Problems solved by technology

However, the above-mentioned situation has a problem that, for example, when the thickness of the open mask sheet is about 50 to 200 μm, the size determination line of the opening has a very large vertical distance of about 60 to 80 μm with respect to the substrate surface. The direction is separated by a distance, and the narrow width of the lower groove C2 hardly forms a cone angle for the incidence of the thin film forming material.

Therefore, a shadow area S having a large width of about 120 to 130 μm is generated on the edge of the substrate film layer D, and there is a problem that the precision of the edge of the display is reduced due to the above-mentioned shadow phenomenon.

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