Semiconductor equipment scheduling method, scheduling device and system
A scheduling method and a scheduling device technology, which are applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve the problem of blocking risk of multiple tasks scheduled by the scheduling device, and achieve the effect of reducing the risk of blocking and reducing the amount of calculation
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Embodiment 1
[0035] This embodiment provides a scheduling method for semiconductor equipment. The semiconductor equipment includes multiple functional modules. The scheduling method is used to schedule multiple tasks, wherein each task is used to take at least one wafer w out of the wafer box and sequentially transfer it to the Many of the functional modules are then transmitted into the crystal box.
[0036] The functional module is, for example, a pre-evacuated chamber or a process chamber for processing the wafer w such as deposition and etching.
[0037] The semiconductor equipment is used to perform a plurality of tasks, each task is used to process at least one wafer w. One of the tasks, for example, is to sequentially take out a wafer w from the second crystal box LP2, then transfer it to the first pre-evacuation chamber LA, and then transfer it to the first process chamber CH1 and the third process chamber CH3 in sequence. . The fifth process chamber CH5 is then transferred into t...
Embodiment 2
[0067] This embodiment provides a semiconductor device scheduling device for executing the method provided in Embodiment 1. The semiconductor equipment includes a plurality of functional modules, and the scheduling device is used to schedule a plurality of tasks, wherein each task is used to take at least one wafer out of the crystal box and sequentially transfer it to a plurality of the functional modules and then transfer it into the wafer box. Such as Figure 5 As shown, the scheduling device includes:
[0068] The first acquisition module 1 is used to acquire the first status information of the last wafer transmitted to the first functional module in the previous task, and send the first status information to the second acquisition module;
[0069] The second acquisition module 2 is used to acquire the distribution status of the wafers in the functional modules involved in the previous task when the first status information is received;
[0070] The judging module 3 is u...
Embodiment 3
[0076] This embodiment provides a semiconductor device system, including the semiconductor device scheduling device provided in Embodiment 2 of the present invention, and also includes the semiconductor device, the semiconductor device includes multiple functional modules, and the scheduling device is used to schedule multiple tasks, each of which The task is to take at least one wafer out of the crystal box and sequentially transfer it to multiple functional modules and then transfer it into the crystal box.
[0077]Optionally, the functional modules include a pre-evacuation chamber and a process chamber, and each task is used to take at least one wafer out of the wafer box and sequentially transfer to multiple functional modules among them, and then transfer the wafer into the wafer box including: Each task is used to take at least one wafer out of the wafer box and sequentially transfer to the pre-evacuation chamber, at least one process chamber, the pre-evacuation chamber, ...
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