Laser frequency stabilization method and device based on temperature self-sensing flexible film heater

Abstract

The present invention proposes a laser frequency stabilization method and device based on a temperature self-sensing flexible film heater. The heat conduction shell is arranged in the heat insulation layer, and the heat dissipation layer has a light transmission hole near the two ends of the laser tube, and the polarizing beam splitter is arranged outside one of the light transmission holes. The optical power conversion circuit is arranged on the reflection and refraction optical path of the polarization beam splitter, the flexible film, the temperature measurement circuit and the A / D conversion circuit are sequentially connected in one direction, and the temperature sensor is bonded to the outer wall of the heat dissipation layer. The temperature sensor is unidirectionally connected with the microprocessor. The method of the present invention can make the frequency repeatability of the laser from 10 ‑8 up to 10 ‑9 , The device of the present invention avoids the thermal hysteresis effect caused by heat transfer, and provides real-time and accurate temperature data for the frequency stabilization algorithm of the laser.

Description

technical field [0001] The invention relates to a laser frequency stabilization method and device based on a temperature self-sensing flexible film heater, and belongs to the technical field of laser applications. Background technique [0002] With the advancement of science and technology, ultra-precision and microelectronics manufacturing has become one of the concrete manifestations of technological competition, and affects various fields such as national defense applications and national economy. As a prerequisite for ultra-precision and microelectronics manufacturing, ultra-precision measurement technology must also be Developing in the direction of high precision and large size, in the method of realizing ultra-precision measurement, the laser interferometry method has the advantages of high measurement accuracy, high dynamic measurement speed, and small influence of the external environment, and has important applications in length measurement and vibration measurement...

AI Technical Summary

Problems solved by technology

[0008] The present invention proposes a laser frequency stabilization method and device based on a temperature self-sensing flexible thin film heater. The purpose is to provide a new type of heating and temperature measurement method for lasers based on thermal frequency stabilization methods for the lack of frequency reproducibility of existing lasers. Provide a laser light source with high frequency stability and high frequency reproducibility for the industrial site of the new generation of ultra-precision machining measurement

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