Laser frequency stabilization method and device based on temperature self-sensing flexible film heater

Abstract

The invention provides a laser frequency stabilization method and device based on a temperature self-sensing flexible film heater. The positive electrode and the negative electrode of a double-longitudinal-mode laser power supply are connected with the two ends of a laser tube respectively. The laser tube is nested in a heat conduction shell and is arranged in a heat isolation layer; the positions, close to the two ends of the laser tube, of the heat dissipation layer are each provided with a light transmitting hole. The polarizing beam splitter is arranged outside one of the light transmitting holes; the light power conversion circuit is arranged on a reflection and refraction light path of the polarizing beam splitter, the flexible film, the temperature measurement circuit and the A / D conversion circuit are sequentially connected in a one-way mode, the temperature sensor is bonded to the outer wall of the heat dissipation layer, and the temperature sensor is connected with the microprocessor in a one-way mode. According to the method, the frequency reproducibility of the laser can be improved from 10 <-8 > to 10 <-9 >, the thermal hysteresis effect generated by heat transfer is avoided, and real-time and accurate temperature data are provided for a frequency stabilization algorithm of the laser.

Description

technical field [0001] The invention relates to a laser frequency stabilization method and device based on a temperature self-sensing flexible film heater, and belongs to the technical field of laser applications. Background technique [0002] With the advancement of science and technology, ultra-precision and microelectronics manufacturing has become one of the concrete manifestations of technological competition, and affects various fields such as national defense applications and national economy. As a prerequisite for ultra-precision and microelectronics manufacturing, ultra-precision measurement technology must also be Developing in the direction of high precision and large size, in the method of realizing ultra-precision measurement, the laser interferometry method has the advantages of high measurement accuracy, high dynamic measurement speed, and small influence of the external environment, and has important applications in length measurement and vibration measurement...

AI Technical Summary

Problems solved by technology

[0008] The present invention proposes a laser frequency stabilization method and device based on a temperature self-sensing flexible thin film heater. The purpose is to provide a new type of heating and temperature measurement method for lasers based on thermal frequency stabilization methods for the lack of frequency reproducibility of existing lasers. Provide a laser light source with high frequency stability and high frequency reproducibility for the industrial site of the new generation of ultra-precision machining measurement

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