Flow rate detection device, flow rate control system, and flow rate detection method

A flow detection device and a technology of flow value, which are applied in the direction of flow control using electrical devices, flow control, and detection of fluid flow by measuring differential pressure. The effect of improving detection efficiency

Active Publication Date: 2020-05-05
BEIJING SEVENSTAR FLOW CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The present invention at least partly solves the problems of inaccurate gas flow detection and slow response of

Method used

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  • Flow rate detection device, flow rate control system, and flow rate detection method
  • Flow rate detection device, flow rate control system, and flow rate detection method
  • Flow rate detection device, flow rate control system, and flow rate detection method

Examples

Experimental program
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Effect test

Embodiment 1

[0037] The present invention provides a flow detection device 10, the flow detection device 10 can be a gas mass flow detection device, a gas volume flow detection device, or other suitable gas flow detection devices, in this embodiment the gas mass flow detection device As an example to describe.

[0038] Such as figure 1 As shown, the flow detection device 10 of this embodiment is used to detect the flow rate in the gas channel 20, the gas channel 20 includes connected upstream channels and downstream channels, the connection of the upstream channel and the downstream channel forms a throat 21, and the throat The cross-sectional area of ​​the mouth 21 is smaller than the cross-sectional area of ​​any one of the upstream passage and the downstream passage, and the flow detection device 10 includes:

[0039] The first pressure testing unit 11 is used to measure the first pressure value of the upstream channel;

[0040] The second pressure testing unit 12 is used to measure t...

Embodiment 2

[0056] Such as figure 1 As shown, this embodiment provides a flow control system, including:

[0057] The flow detection device 10 in embodiment 1;

[0058] The gas channel 20 includes an upstream channel and a downstream channel that are connected. The gas flows in from the upstream channel and then flows out through the downstream channel. Wherein, the junction of the upstream channel and the downstream channel forms a throat 21, and the cross-sectional area of ​​the throat 21 is smaller than that of the upstream channel. and the cross-sectional area of ​​either of the downstream channels;

[0059] The valve device 30 is arranged at the gas inlet 22 of the upstream channel, and is used for controlling the gas flow of the gas channel 20 according to the corrected flow value obtained by the flow detection device 10 .

[0060] Wherein, the cross-sectional area of ​​the throat 21 of the gas channel 20 mentioned here can be that the cross-sectional area of ​​the upstream channe...

Embodiment 3

[0067] Such as image 3 As shown, this embodiment provides a detection method for a flow detection device, which may be a method for a gas mass flow detection device, a method for a gas volume flow detection device, or other suitable gas flow detection methods. In this embodiment Take the detection device used for gas mass flow detection device as an example to describe

[0068] The detection method of the flow detection device includes:

[0069] S10, when the gas passes through the throat 21 of the gas channel 20, respectively measure the first pressure value of the upstream channel and the second pressure value of the downstream channel of the gas channel 20.

[0070] Wherein, the gas passage 20 includes an upstream passage and a downstream passage connected, and the junction of the upstream passage and the downstream passage forms a throat 21, and the cross-sectional area of ​​the throat 21 is smaller than that of any one of the upstream passage and the downstream passage....

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Abstract

The invention provides a flow detection device, a flow control system and a flow detection method, belongs to the technical field of semiconductor process manufacturing. The device and the system canat least partially solve the problems that an existing flow detection device is inaccurate in gas flow detection and slow in response. According to the flow detection device, the device is used for detecting flow in a gas channel. The gas channel comprises an upstream channel and a downstream channel which are connected with each other. A throat is formed at the joint of the upstream channel and the downstream channel. The cross sectional area of the throat is smaller than that of any one of the upstream channel and the downstream channel. The flow detection device comprises a first pressure test unit used for measuring a first pressure value of the upstream channel; a second pressure testing unit, used for measuring a second pressure value of the downstream channel; and a flow calculationunit, respectively connected with the first pressure test unit and the second pressure test unit so as to obtain a corrected flow value according to the first pressure value and the second pressure value.

Description

technical field [0001] The invention belongs to the technical field of semiconductor process manufacturing, and in particular relates to a flow detection device, a flow control system and a flow detection method. Background technique [0002] Gas mass flow controller (Mass Flow Controller, MFC) is used for precise measurement and control of gas mass flow, mainly used in scientific research in various fields such as semiconductor integrated circuit technology, special materials, chemical industry, petroleum industry, medicine and environmental protection and in production. [0003] A gas mass flow control system in the prior art mainly includes a thermal sensor, a differential amplifier, a filter, and a controller. The gas mass flow control system mainly controls the gas flow by detecting the temperature of the gas, but due to the temperature Conduction takes a certain amount of time, so there are problems such as long warm-up time, poor control accuracy and repeatability wh...

Claims

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Application Information

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IPC IPC(8): G01F1/36G05D7/06
CPCG01F1/363G05D7/0635
Inventor 王瑞牟昌华赵迪
Owner BEIJING SEVENSTAR FLOW CO LTD
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