Full-flexible heatable gas sensor and manufacturing method thereof

A gas sensor and heating technology, used in instruments, scientific instruments, measuring devices, etc., can solve the problems of difficult to meet the damage of gas sensors and flexible substrate devices, and achieve the effect of simple preparation process, easy integration and good performance
CN111103331AActive Publication Date: 2020-05-05安徽芯淮电子有限公司
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
安徽芯淮电子有限公司
Publication Date
2020-05-05

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Abstract

The invention discloses a full-flexible heatable gas sensor and a manufacturing method thereof. The full-flexible heatable gas sensor comprises a flexible sensitivity test structure and a flexible packaging structure. The flexible packaging structure comprises a flexible cover plate, the flexible cover plate and the flexible sensitivity test structure are combined in a sealed mode to form a packaging cavity, and the packaging cavity is communicated with at least one gas hole formed in the flexible cover plate; the flexible sensitivity test structure comprises a heat insulation layer, a heatinglayer, a heat conduction insulation layer and a gas sensitive structure which are sequentially laminated on the flexible substrate, and the gas sensitive structure is also electrically connected witha test electrode, wherein at least the gas sensitive structure is arranged in the packaging cavity. According to the full-flexible heatable gas sensor, the full-printing process is combined with a semiconductor oxidation material, and processes such as photoetching and the like are not needed so that the damage of high-temperature or chemical corrosive liquid to a flexible substrate or a device is avoided.
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Description

technical field

[0001] The invention relates to a gas sensor, in particular to a fully flexible and heatable gas sensor and a manufacturing method thereof, belonging to the technical field of flexible electronic devices. Background technique

[0002] Gas sensors are widely used to detect flammable gases, toxic gases and atmospheric components, and quickly and sensitively monitor various gases that are harmful to the environment (such as NO 2 , CO and H 2 S, etc.) has become one of its important tasks. As a device that detects toxic gas components and converts them into appropriate electrical signals, gas sensors play an extremely important role in the fields of industrial production, home security, environmental monitoring, and medical care. As the application of gas sensors becomes wider and wider, the requirements for their scope of use and performance are getting higher and higher, so the research and development of new gas sensors is imperative.

[0003] At present, t...

Claims

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