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Mechanical groove enhanced differential piezoelectric ultrasonic transducer and working method thereof

An ultrasonic transducer, piezoelectric ultrasonic technology, applied in the direction of the fluid using vibration, can solve the problems of inability to play a role in performance, small output signal, weak sensitive signal, etc., to improve the application ability and application range, and increase the output. Signal, enhance the effect of sensitive signal

Pending Publication Date: 2020-05-12
CHONGQING UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The output signal is small, the sensitive signal is weak, and the low sensitivity will make the ultrasonic transducer chip unable to work normally, unable to play a role in performance, let alone large-scale promotion and application

Method used

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  • Mechanical groove enhanced differential piezoelectric ultrasonic transducer and working method thereof
  • Mechanical groove enhanced differential piezoelectric ultrasonic transducer and working method thereof
  • Mechanical groove enhanced differential piezoelectric ultrasonic transducer and working method thereof

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Embodiment Construction

[0029] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.

[0030] In the description of the present invention, unless otherwise specified and limited, it should be noted that the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be mechanical connection or electrical connection, or two The internal communication of each element may be directly connected or indirectly connected through an intermediary. Those skilled in the art can understand the specific meanings of the above terms according to specific situations.

[0031] Such as Fi...

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Abstract

The invention provides a mechanical groove enhanced differential piezoelectric ultrasonic transducer and a working method thereof. The ultrasonic transducer comprises an ultrasonic transducer body, wherein the ultrasonic transducer body comprises a base layer, a stop layer, an elastic layer, a bottom electrode and a piezoelectric layer, a cavity is formed in the bottom of the base layer, the stoplayer is fixedly arranged on the base layer, and the elastic layer, the bottom electrode and the piezoelectric layer are sequentially arranged in the direction from the base layer to the stop layer. Atop inner electrode is arranged on the piezoelectric layer, a top outer electrode is arranged around the periphery of the top inner electrode, a mechanical groove set is formed between the top innerelectrode and the top outer electrode, and an opening of the mechanical groove set faces the piezoelectric layer. The ultrasonic transducer is simple in structure, the differential electrode design ofthe top inner electrode and the top outer electrode enables the ultrasonic transducer to work in a differential electrode working mode, and signals in an ideal state of the mode can be doubled and enhanced to a single electrode working mode. Meanwhile, due to the design of the mechanical groove, output signals and sensitive signals of the ultrasonic transducer can be enhanced, and then the sensing sensitivity of the ultrasonic transducer is improved.

Description

technical field [0001] The invention relates to the technical field of ultrasonic detection, in particular to a mechanical groove-enhanced differential piezoelectric ultrasonic transducer and a working method thereof, which are applied in the fields of distance measurement, gesture recognition, liquid velocity and flow measurement, and the like. Background technique [0002] Ultrasonic detection (sensing) technology, as a kind of acoustic sensing technology, refers to the use of ultrasonic characteristics such as good directionality, strong directivity and small attenuation to measure distance, flow velocity, flow and other physical parameters. detection technology. Piezoelectric ultrasonic transducer, as the core component of high-end ultrasonic testing equipment, is an energy conversion device that uses positive piezoelectric effect and inverse piezoelectric effect to perform acoustic-electric and electrical-acoustic conversion. When the piezoelectric ultrasonic transduce...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B06B1/06
CPCB06B1/0603
Inventor 牟笑静周雪梅黄河蔡贵祥易拥洁
Owner CHONGQING UNIV
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