Efficient nanometer vacuum evaporation source

Abstract

The invention discloses a high-efficiency nano vacuum evaporation source. The high-efficiency nano vacuum evaporation source comprises a heat shielding assembly with an open top end, the bottom of theheat shielding assembly is connected with a vacuum flange, and a crucible assembly used for loading a source material is arranged in the heat shielding assembly; the crucible assembly comprises a U-shaped crucible, and a cover plate integrally formed with the U-shaped crucible is arranged at the top of the U-shaped crucible; an evaporation opening is formed in the middle of the cover plate, and atop cover capable of rotating relative to the cover plate is arranged at the top of the cover plate; the upper end of the top cover is connected with a driving piece fixedly connected to the heat shielding assembly, and a through hole matched with the evaporation opening is formed in the middle of the top cover; and a cleaning piece for cleaning the evaporation opening is arranged in the throughhole. According to the nano vacuum evaporation source, the scattering surface is reduced on the premise that the capacity of the crucible is not influenced, the waste rate of source materials is reduced, the blocking phenomenon of the opening is effectively avoided, and the evaporation efficiency of the source materials is guaranteed.

Description

technical field [0001] The invention relates to the technical field of vacuum coating, in particular to a high-efficiency nanometer vacuum evaporation source. Background technique [0002] The nano-vacuum evaporation source is the core component of the nano-vacuum coating equipment, which can realize the nano-level high-precision control of the source material. The crucible (i.e., the container used to load the source material) of the nano-vacuum evaporation source commonly used in the market is U-shaped, but the U-shaped opening is completely open and has a large diameter, so the scattering surface is large. Sometimes, a considerable part of the nanomaterials cannot be collected by the substrate, but are deposited in other positions other than the substrate, resulting in a high waste rate of materials. If the crucible is made into a conical structure, although the scattering surface can be reduced by reducing the aperture, the capacity of the crucible will be reduced, whic...

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Problems solved by technology

[0003] In order to overcome the above disadvantages, the object of the present invention is to provide a high-efficiency nano-vacuum evaporation source, which reduces the scattering surface without affecting the capacity of the crucible, reduces the waste rate of source materials, and effectively avoids the clogging of the opening, ensuring Evaporation efficiency of the source material

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