A Method for Optimizing the Characteristic Parameters of Dispersive Confocal Microscope
A technique of dispersion confocal and optimization method, which is applied in the field of dispersion confocal microscopy, and can solve problems such as paraxial diffraction approximation not being satisfied
Active Publication Date: 2020-10-23
HUAZHONG UNIV OF SCI & TECH
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[0006] (3) The paraxial diffraction approximation does not satisfy
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[0062] In order to make the object, technical solution and advantages of the present invention more clear, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
[0063] In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not constitute a conflict with each other. The present invention will be further described in detail below in combination with specific embodiments.
[0064] figure 1 It is a structural schematic diagram of the optical imaging system of the dispersive confocal microscope of the embodiment of the present invention. Such as figure 1 As shown, the optical imaging system of a dispersive confocal microscope is usually composed of...
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Abstract
The invention discloses an optimization method for characteristic parameters of a dispersion confocal microscope. The optimization method comprises the steps: obtaining an axial response confocal signal intensity function on a detector through employing a mapping relation between an intensity function of an actual image on a plane of a detection pinhole and a sensitivity function of a circular detector; obtaining a distance function from focuses of light of all wavelengths of the multicolor pinhole light source to a refracting surface, and obtaining dispersion displacement functions of all wavelengths; obtaining a dispersion confocal signal function of the dispersion confocal microscope by utilizing a mapping relationship between the axial response confocal signal intensity function on thedetector and dispersion displacement functions of all wavelengths; and adjusting the characteristic parameters of the dispersion confocal microscope by utilizing the mapping relationship between thecharacteristic parameters represented by the dispersion confocal signal function of the dispersion confocal microscope so as to realize performance optimization of the dispersion confocal microscope.
Description
technical field [0001] The invention belongs to the field of dispersion confocal microscopes, in particular to a method for optimizing characteristic parameters of dispersion confocal microscopes. Background technique [0002] Dispersive confocal microscope uses wavelength scanning of dispersive objective lens instead of mechanical axial scanning in traditional confocal measurement technology, combined with the defocus filtering characteristics of confocal pinhole, it has the advantages of fast measurement speed, no vibration, small system volume, etc., but its accuracy performance Still not enough. The sensing signal directly determines the precision characteristics of the dispersive confocal microscope, so it is particularly important to establish a two-dimensional dispersive confocal sensing signal model to improve the precision performance of the dispersive confocal microscope. Its importance is mainly reflected in the following two aspects: First, the two-dimensional s...
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IPC IPC(8): G02B21/00
CPCG02B21/0024G02B21/0032G02B21/0052
Inventor 卢文龙陈成王健刘晓军周莉萍蒋向前汪洁
Owner HUAZHONG UNIV OF SCI & TECH