Liquid medicine proportioning method and liquid medicine proportioning device

A technology of liquid medicine and flow control device, which is applied in mixing methods, chemical instruments and methods, transportation and packaging, etc., can solve the problems of slow injection of pulse pump liquid medicine, limited metering pump liquid injection speed, affecting equipment production capacity, etc. To achieve the effect of improving the precision and reliability of the proportioning of the liquid medicine, improving the process effect and productivity of the equipment, and shortening the mixing time of the liquid medicine

Active Publication Date: 2020-06-02
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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Problems solved by technology

Secondly, the control mode of the pulse pump belongs to open-loop control. If the pump or the pneumatic valve fails and does not operate, the system will be difficult to distinguish, which will greatly affect the cleaning process.
In addition, the injection of the two liquids must be carried out step by step when the liquid is mi

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  • Liquid medicine proportioning method and liquid medicine proportioning device
  • Liquid medicine proportioning method and liquid medicine proportioning device
  • Liquid medicine proportioning method and liquid medicine proportioning device

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[0047] In order to enable those skilled in the art to better understand the technical solutions of the present invention, the medicinal solution proportioning method and the medicinal solution proportioning device provided by the present invention will be described in detail below with reference to the accompanying drawings.

[0048] Such as figure 2 Shown is a flow chart of a method for proportioning a medicinal solution provided in the first embodiment of the present invention. In this embodiment, the method for proportioning a medicinal solution includes:

[0049] Step 100: Inject the first liquid medicine into the first container.

[0050] Step 101: While injecting the first liquid medicine, inject the second liquid medicine into the first container.

[0051] Step 102: Acquire the first flow rate value of the first liquid medicine in real time.

[0052] Step 103: Calculate and obtain the second flow value of the second liquid medicine according to the first flow value and the prese...

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Abstract

The invention provides a liquid medicine proportioning method and a liquid medicine proportioning device. The liquid medicine proportioning method comprises the following steps: injecting a first liquid medicine into a first container; injecting a second liquid medicine into the first container while injecting the first liquid medicine; acquiring a first flow value of the first liquid medicine inreal time; calculating to obtain a second flow value of the second liquid medicine according to the first flow value and a preset liquid medicine proportion value; and according to the second flow value, maintaining the flow of the second liquid medicine within a first preset numerical value range with the second flow value as the center. According to the invention, the liquid medicine proportioning precision and reliability are improved.

Description

technical field [0001] The invention relates to the field of semiconductor equipment, in particular to a method for proportioning liquid medicine and a proportioning device for liquid medicine. Background technique [0002] At present, in the semiconductor production process, almost every process involves a cleaning process, and the quality of wafer cleaning has an important impact on the performance of semiconductor devices. The proportioning accuracy of the chemical solution in the cleaning process has a great influence on the corrosion rate and uniformity of the metal on the surface of the silicon wafer. If the proportioning accuracy is not high, the chemical liquid will corrode on the wafer surface and the cleaning effect will be different, resulting in different batches. The surface structure of the secondary silicon wafer is poor in consistency, which even affects the yield rate of the chip. [0003] Such as figure 1 Shown is a schematic structural diagram of a chemi...

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Application Information

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IPC IPC(8): B01F3/08B01F15/04
CPCB01F23/45B01F35/83B01F2101/24
Inventor 李文杰张明马超牛超
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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