Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Liquid medicine proportioning method and liquid medicine proportioning device

A technology of liquid medicine and flow control device, which is applied in mixing methods, chemical instruments and methods, transportation and packaging, etc., can solve the problems of slow injection of pulse pump liquid medicine, limited metering pump liquid injection speed, affecting equipment production capacity, etc. To achieve the effect of improving the precision and reliability of the proportioning of the liquid medicine, improving the process effect and productivity of the equipment, and shortening the mixing time of the liquid medicine

Active Publication Date: 2020-06-02
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
View PDF5 Cites 4 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Secondly, the control mode of the pulse pump belongs to open-loop control. If the pump or the pneumatic valve fails and does not operate, the system will be difficult to distinguish, which will greatly affect the cleaning process.
In addition, the injection of the two liquids must be carried out step by step when the liquid is mixed, and the injection of the pulse pump is slow, which affects the production capacity of the equipment.
In addition, limited by the injection speed of the metering pump, this method is generally used for large-ratio (such as 100:1) liquid medicine ratios, such as liquid medicine dilution, and there are few application scenarios

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Liquid medicine proportioning method and liquid medicine proportioning device
  • Liquid medicine proportioning method and liquid medicine proportioning device
  • Liquid medicine proportioning method and liquid medicine proportioning device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0047] In order to enable those skilled in the art to better understand the technical solution of the present invention, the medical solution mixing method and the medical solution mixing device provided by the present invention will be described in detail below in conjunction with the accompanying drawings.

[0048] Such as figure 2 As shown, it is a block flow diagram of the liquid medicine proportioning method provided in the first embodiment of the present invention. In this embodiment, the liquid medicine proportioning method includes:

[0049] Step 100: inject the first medical solution into the first container.

[0050] Step 101: While injecting the first medical solution, inject the second medical solution into the first container.

[0051] Step 102: Obtain the first flow rate value of the first medicinal liquid in real time.

[0052] Step 103: Calculate and obtain a second flow rate value of the second medical solution according to the first flow rate value and the...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention provides a liquid medicine proportioning method and a liquid medicine proportioning device. The liquid medicine proportioning method comprises the following steps: injecting a first liquid medicine into a first container; injecting a second liquid medicine into the first container while injecting the first liquid medicine; acquiring a first flow value of the first liquid medicine inreal time; calculating to obtain a second flow value of the second liquid medicine according to the first flow value and a preset liquid medicine proportion value; and according to the second flow value, maintaining the flow of the second liquid medicine within a first preset numerical value range with the second flow value as the center. According to the invention, the liquid medicine proportioning precision and reliability are improved.

Description

technical field [0001] The invention relates to the field of semiconductor equipment, in particular to a method for proportioning liquid medicine and a proportioning device for liquid medicine. Background technique [0002] At present, in the semiconductor production process, almost every process involves a cleaning process, and the quality of wafer cleaning has an important impact on the performance of semiconductor devices. The proportioning accuracy of the chemical solution in the cleaning process has a great influence on the corrosion rate and uniformity of the metal on the surface of the silicon wafer. If the proportioning accuracy is not high, the chemical liquid will corrode on the wafer surface and the cleaning effect will be different, resulting in different batches. The surface structure of the secondary silicon wafer is poor in consistency, which even affects the yield rate of the chip. [0003] Such as figure 1 Shown is a schematic structural diagram of a chemi...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): B01F3/08B01F15/04
CPCB01F23/45B01F35/83B01F2101/24
Inventor 李文杰张明马超牛超
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com