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Calibration device and calibration method for mems micro force-torque sensor

A technology of torque sensor and calibration device, applied in the direction of measurement device, force/torque/work measuring instrument calibration/test, instrument, etc., can solve the problems of complex calibration process, poor accuracy, inconvenient operation, etc., and achieve accurate measurement results , The loading process is stable and accurate, and the effect of improving the measurement accuracy

Active Publication Date: 2021-09-28
SHANGHAI INST OF TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The purpose of the present invention is to provide a calibration device and a calibration method for MEMS micro force-torque sensors in order to overcome the defects of poor precision, complicated calibration process and inconvenient operation in the prior art.

Method used

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  • Calibration device and calibration method for mems micro force-torque sensor
  • Calibration device and calibration method for mems micro force-torque sensor
  • Calibration device and calibration method for mems micro force-torque sensor

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Embodiment

[0034] A kind of calibration device of MEMS micro force-moment sensor, such as figure 1 As shown, it includes a test platform, a nano-indenter 1 located on the test platform, an inclined platform assembly located on the placement platform of the nano-indenter 1, and an analog-to-digital conversion connected with the MEMS micro force-torque sensor 2 to be tested The circuit 5 and the sensor power supply 3 are connected to a computer 6 in order to display data.

[0035]The MEMS micro force-torque sensor 2 to be tested is a six-axis sensor, including a sensor body 21 and a column 22 connected to the sensor body 21; the sensor body 21 is fixed on the slope of the inclined platform element 4; the force rod 11 of the nanoindentation instrument 1 Align with the column 22 in the vertical direction. The MEMS micro force-torque sensor 2 to be tested consists of its PCB, substrate, cover, leads, sensor, column, and silicone shell. Adhere the sensing chip to the plastic substrate. Epox...

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Abstract

The invention relates to a calibration device for a MEMS micro-force-torque sensor, which is characterized in that it comprises a test platform, a nano-indentation instrument located on the test platform, an inclined platform assembly located on a placement platform of the nano-indentation instrument, and The analog-to-digital conversion circuit connected to the MEMS micro-torque sensor to be measured and the sensor power supply; the inclined platform assembly includes several inclined-plane platform elements with different inclination angles; the MEMS micro-force-torque sensor to be measured is a six-axis sensor, including a sensor The main body and the column connected with the sensor body; the sensor body is fixed on the inclined surface of the inclined platform element; the force rod of the nanoindentation instrument is vertical to the column align. Compared with the prior art, the invention has the advantages of low cost, high calibration precision and the like.

Description

technical field [0001] The invention relates to a calibration device and a calibration method of a MEMS micro force-torque sensor, in particular. Background technique [0002] The touch sensor used in the robot finger is made of semiconductor material monocrystalline silicon. The components include a hemispherical silicone shell, a dowel, a base, a sensor chip, a circuit board, and a wire. The contact sensor at the fingertips causes a change in voltage through the pressure between objects, thereby generating force and torque. This sensor enables the robot to accurately pick up objects and perform object recognition. This sensor is a six-axis sensor, through its piezoresistive effect, the applied force can be decomposed to obtain its horizontal and vertical components, so as to compare the voltage and the applied force. By integrating this sensor array on a flexible substrate with high density, a high-performance sensor is further manufactured. The target function of this to...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L25/00
CPCG01L25/00
Inventor 李以贵邱霁玄王欢张成功吴文渊金敏慧王洁
Owner SHANGHAI INST OF TECH
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