Optical member and producing method of optical member
A technology for optical components and manufacturing methods, applied in optical elements, optics, vehicle parts, etc., can solve problems such as difficulty, layer thickness does not become uniform, limited materials, etc., to achieve excellent salt water resistance and improve dissolution and peeling properties. Effect
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no. 1 Embodiment approach
[0144]
[0145] Figure 4 It is a schematic diagram of an ion beam sputtering film forming apparatus that sputters with an ion beam irradiated from an ion source according to the present invention. However, this figure is an example and is not limited thereto.
[0146] The ion beam sputtering film forming device 50 and image 3 Similarly, the IAD vapor deposition apparatus provided in the chamber 2 includes a dome 3 , and the substrate 4 is arranged along the dome 3 .
[0147] The sputtering source is the IAD ion source 7 , and the first sputtering target 52 and the second sputtering target 53 are irradiated with the ion beam 8 irradiated from the IAD ion source 7 . exist Figure 4 In , the case where binary sputtering is performed is described, but one type of sputtering target may be used.
[0148] As for the first sputtering target 52 and the second sputtering target 53, they are disposed on the target holder 51 between the substrate 4 and the IAD ion source 7. For th...
no. 2 Embodiment approach
[0174]
[0175] Figure 7 It is a schematic diagram showing an example of a film forming apparatus including an IAD vapor deposition apparatus and an ion beam sputtering apparatus capable of continuously forming a dielectric multilayer film as a lower layer and an uppermost layer according to the present invention.
[0176] In terms of the film forming device 90, with image 3Similarly, the IAD vapor deposition apparatus provided in the chamber 2 includes a dome 3 , and the substrate 4 is arranged along the dome 3 . Evaporation source 5 is provided with an electron gun for evaporating the vapor deposition substance. Evaporation substance 6 is scattered from vapor deposition source 5 to substrate 4 and condenses and solidifies on substrate 4 . At this time, the substrate is irradiated with an ion beam 8 from the IAD ion source 7, and the high kinetic energy of the ions is exerted during film formation to form a dense film or improve the adhesive force of the film.
[0177] ...
Embodiment
[0189] Hereinafter, although an Example is given and this invention is demonstrated concretely, this invention is not limited to these. In addition, the expression of "part" or "%" is used in an Example, Unless otherwise specified, it means "part by mass" or "% by mass".
[0190]
[0191] use Figure 7 In the film formation apparatus shown in , the deposition by the IAD method and the sputtering film formation using the IAD ion source were performed under the following conditions. The film-forming materials used in Examples are as follows.
[0192] 〈Film-forming material〉
[0193] SiO 2 : Merck company product name SIO 2
[0194] Ta 2 o 5 : Canon Optran Co., Ltd. product name A600
[0195] TiO 2 : Product name Ti made by Fuji Chitan Co., Ltd. 3 o 5
[0196] MgF 2 : Merck company trade name MgF 2
[0197] al 2 o 3 : Merck company trade name Al 2 o 3
[0198] SUS304: stainless steel
[0199]
[0200] Glass base board
[0201]
[0202] (chamber conditi...
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Abstract
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