Double-probe nanometer measuring instrument
A measuring instrument and dual-probe technology, which can be applied to instruments, measuring devices, and optical devices, etc., and can solve the problems of large volume and inability to realize nanometer measurement.
Pending Publication Date: 2020-06-05
深圳明锐仪器有限公司
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Problems solved by technology
[0004] Existing nano measurement systems are all equipped with sound-proof and closed-environment equipment such as Figure 10 , but with the development of the times, the volume of the measured object is getting bigger and bigger, even bigger than the house, and the sound-proof and closed-environment equipment cannot be as big as the house, which makes it impossible to realize nanometer measurement
Method used
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Embodiment 1
[0029] Such as Figure 1 to Figure 7 As shown, the nanometer measuring instrument of a kind of double-probe includes a measuring instrument main body 10; the front end of the measuring instrument main body 10 is provided with a first probe 11 and a second probe 12; the first probe 11 It is used to detect the signal of the measured object under the interference of the external environment; the second probe 12 is used to detect the interference signal of the environment near the measured object.
[0030] Specifically: the measuring instrument main body 10 is used to be installed on a nanometer measuring system; the first probe 11 is provided with a first needle point 111 and a first physical decoding 112; the second probe 12 is provided with a second needle point 121. The second physical decoding 122; the radius of curvature of the tip of the first needle tip 111 is on the order of nanoscale, the radius of curvature of the tip of the second needle tip 121 is larger than that of ...
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The invention discloses a double-probe nanometer measuring instrument. The double-probe nanometer measuring instrument comprises a measurer main body; a first probe and a second probe are arranged atthe front end of the measurer main body, wherein the first probe is used for detecting a signal of a measured object under the interference of an external environment; the second probe is used for detecting an interference signal of the surrounding environment of the measured object; the beneficial effects of the invention are that the design employs two probes, one probe detects the signal of a measured object under the interference of an external environment, the other probe detects the interference signal of the environment nearby the measured object, and the obtained value is the value ofthe measured object through calculating two signal values and subtracting the last two values; a traditional closed bad mirror device is omitted in the nanometer measuring system, and a large measuredobject can be measured.
Description
technical field [0001] The invention relates to the technical field of nanometer measuring systems, in particular to a double-probe nanometer measuring instrument. Background technique [0002] Nano measurement technology is one of the basic sciences of nano science and technology. The rapid development of nano science and technology provides new development opportunities for nano measurement technology. [0003] In industrial production, it is often necessary to measure key parameters in the manufacturing process of some industrial products, and their magnitudes are all nanoscale. For example, the glass backplane of an LED display can be judged by measuring the key The quality of the LED display; the existing nano-measurement system, its working principle is as follows Figure 8 ,The probe is driven to detect the surface of the measured object through scanning drive. The diameter of the tip of the probe is about the order of nanometer scale. Very small vibration, at this ...
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Login to View More IPC IPC(8): G01B11/00
CPCG01B11/00
Inventor 苏全民陈庚亮
Owner 深圳明锐仪器有限公司