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Wafer cassette placing frame and wafer storage cabinet

A wafer storage and wafer box technology, applied in the field of wafer manufacturing, can solve the problems of falling, entering the wafer box, wafer contamination, etc., to avoid pollution, prevent particle pollution, and improve cleanliness.

Active Publication Date: 2020-06-19
ZING SEMICON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The existing wafer rack is usually a three-dimensional rack made of pure stainless steel, and the wafer box is generally made of hard engineering plastics such as PP and acrylic. The process of placing the wafer box on and taking it out of the wafer rack In the process, stainless steel powder is easily generated by friction with the wafer rack. These stainless steel powders are likely to fall onto the wafer box and enter into the wafer box during the subsequent opening process of the wafer box, resulting in wafer damage. Pollution

Method used

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  • Wafer cassette placing frame and wafer storage cabinet
  • Wafer cassette placing frame and wafer storage cabinet
  • Wafer cassette placing frame and wafer storage cabinet

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0038] figure 1 It is a schematic structural diagram of the wafer cassette placing rack 1 according to Embodiment 1 of the present invention.

[0039] Such as figure 1 As shown, the present invention provides a wafer box placement frame 1, the wafer box placement frame 1 includes a fixed frame and an anti-friction guide rail 2 for placing a wafer box, and at least one wafer is arranged on the fixed frame Cassette placement area A; the anti-friction guide rail 2 is arranged on the wafer cassette placement area A. The wafer cassette placement rack 1 of the present invention can effectively prevent particle pollution such as stainless steel powder due to friction between the wafer cassette and the wafer cassette placement rack 1, and can effectively avoid the pollution of the wafer cassette, thereby avoiding the pollution and improve the cleanliness of the wafer.

[0040] The wafer box placement rack 1 can be in any shape, as long as it matches the specifications of the wafer ...

Embodiment 2

[0051] Figure 4 It is a schematic structural diagram of a wafer storage cabinet according to Embodiment 2 of the present invention.

[0052] Such as Figure 4 As shown, the present invention also provides a wafer storage cabinet. The wafer storage cabinet includes the wafer cassette placement rack 1 as described in Embodiment 1. For the purpose of simplicity, the wafer storage cabinet described in this embodiment The structure of the cassette rack 1 will not be described again, please refer to the first embodiment for details; the wafer storage cabinet also includes a cabinet body 3 , and the wafer cassette rack 1 is located in the cabinet body 3 .

[0053] Described cabinet body 3 can be the cabinet body of metal material, such as stainless steel material, and described cabinet body 3 can also be provided with anti-static setting, such as the anti-static belt of grounding, and described cabinet body 3 can also be provided with filtering device 4 , a dehumidification device...

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Abstract

The invention provides a wafer cassette placing frame and a wafer storage cabinet. The wafer cassette placing frame comprises a fixed frame and an anti-friction guide rail used for placing a wafer cassette, at least one wafer cassette placing area is mounted on the fixed frame, the anti-friction guide rail is mounted on the wafer cassette placing area, the wafer cassette placing frame and the wafer storage cabinet can effectively prevent particle pollutions like stainless steel powder due to friction between the wafer cassette and the placing frame, pollution to the wafer cassette can be effectively avoided, therefore, pollution to a wafer can be avoided, and the cleanliness degree of the wafer can be improved.

Description

technical field [0001] The invention relates to the field of wafer manufacturing, in particular to a wafer box placement frame and a wafer storage cabinet. Background technique [0002] After the fab completes the manufacturing and processing of the wafer, it usually loads the wafer into a dedicated wafer box (frontopen shipping box, referred to as FOSB) and places it together with the wafer box on the wafer rack in the warehouse. After receiving the customer's demand instruction, the wafer will be shipped to the customer's factory together with the wafer box. The existing wafer rack is usually a three-dimensional rack made of pure stainless steel, and the wafer box is generally made of hard engineering plastics such as PP and acrylic. The process of placing the wafer box on and taking it out of the wafer rack In the process, stainless steel powder is easily generated by friction with the wafer rack. These stainless steel powders are likely to fall onto the wafer box and en...

Claims

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Application Information

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IPC IPC(8): B65G1/02
CPCB65G1/02
Inventor 权林林威斌吴恬辛陈晓春祝杰
Owner ZING SEMICON CORP
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