Multi-degree-of-freedom sample rod with sample clamping nozzle

Abstract

The invention discloses a multi-degree-of-freedom sample rod with a sample clamping nozzle, and the rod comprises a sleeve, a pre-tightening screw and a detachable sample clamping nozzle; the sample clamping nozzle comprises a clamping part for loading a sample and a connecting part. Samples of various sizes can be observed, the sample clamping nozzle is arranged to be used for installing the samples, the samples and the sample clamping nozzle can serve as sample assemblies to be installed at the front end of the sample rod, thereby facilitating installation and disassembly.

Description

technical field [0001] The invention relates to a sample rod used under an electron microscope and a transmission electron microscope. Background technique [0002] Transmission electron microscopy (TEM) can see fine structures smaller than 0.2 μm that cannot be seen clearly under ordinary optical microscopes. These structures are called submicrostructures or ultrastructures. In 1932, Ruska invented the transmission electron microscope with electron beam as the light source. Currently, the resolution of TEM can reach 0.2nm. [0003] In situ observation techniques have a long history in transmission electron microscopy research. By applying various physical effects on the sample and using a transmission electron microscope (TEM) to observe the changes in the microstructure and chemical state of the material, it is possible to intuitively study the performance of the material or device in the actual use process. For the performance of the material The research has important ...

AI Technical Summary

Problems solved by technology

[0005] The disadvantages of this three-dimensional probe are: 1. The flexible claw is easy to deform. In order to maintain the friction between it and the ball, the shape of the flexible claw needs to be adjusted frequently, but there are many flexible claws, and it is impossible to ensure that each The consistency of the flexible wire claws, resulting in the lower and lower reliability and accuracy of the three-dimensional probe with the time and frequency of use

2. The length of the flexible wire claw makes there is a gap between the sample holder and the ball. When the ball circulates, the sample holder will move away from the ball or close to the ball along the wire claw, so as to realize the axial displacement of the sample. , but the sample holder is suspended on the ball through flexible wire claws, the sample holder and the sample on it will fall down due to gravity, and the position accuracy is not high

The observation field of view in the transmission electron microscope is at the nanometer and micron level, and the position deviation of

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