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Film thickness control method, device and equipment and computer readable storage medium

A technology of thickness control and control method, which is applied in the direction of measuring devices, optical devices, instruments, etc., and can solve problems such as damage

Inactive Publication Date: 2020-06-30
GOERTEK OPTICAL TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] Based on this, in order to solve the problem that the probe of the step meter is easy to cause damage to the surface of the film sample to be measured by using a step meter for thickness measurement, it is necessary to provide a film thickness control method, device, equipment and computer-readable storage medium, aiming at Can effectively avoid contact measurement, thereby avoiding damage to the surface of the film sample to be tested

Method used

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  • Film thickness control method, device and equipment and computer readable storage medium
  • Film thickness control method, device and equipment and computer readable storage medium
  • Film thickness control method, device and equipment and computer readable storage medium

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no. 1 example

[0058] refer to figure 1 As shown, the first embodiment proposed by the present invention is a film layer thickness control method, and the steps of the control method include:

[0059] Step S10, setting the test thickness of the film layer, coating according to the test thickness to obtain the film layer to be tested; specifically, setting the test thickness of the film layer, usually the test thickness of the film layer is relatively thick, generally reaching more than several hundred nanometers, For example 400 nm. Coating film on the substrate according to the coating process steps, and generating the film layer to be tested on the substrate. In addition, the coating process steps usually include confirming whether the hardware and software of the equipment can work normally, cleaning the coating chamber, adding coating materials, installing the coating substrate, vacuuming to the coating condition, confirming the coating parameters, and starting the coating equipment for...

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Abstract

The invention discloses a film thickness control method, device and equipment and a computer readable storage medium, and the control method comprises the steps: setting the test thickness of a film,carrying out the coating according to the test thickness, and obtaining a to-be-tested film; detecting the to-be-detected film layer, and obtaining the detection thickness of the to-be-detected film layer; comparing the test thickness with the detection thickness to obtain a scale factor; and determining a film thickness value set during film coating according to the scaling factor. Contact measurement can be effectively avoided, and then surface damage of the to-be-measured thin film sample is avoided.

Description

technical field [0001] The invention relates to the technical field of film thickness detection, in particular to a film thickness control method, device, equipment and computer-readable storage medium. Background technique [0002] At present, during the coating process or after the coating is finished, the thickness of the film sample to be tested is usually detected by the step test method. The step test method mainly uses a step meter, and one or more probes with probes are installed in the step meter to measure The surface of the film sample is scanned in a horizontal contact mode. During the scanning process, the probe will move up and down with the tiny peaks and valleys on the surface of the film sample to be tested. The height change of the probe is converted into electrical signals by the displacement sensor. Finally, these signals are recorded for Draw the surface morphology of the film sample to be tested, and test the film thickness of the film sample to be test...

Claims

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Application Information

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IPC IPC(8): G01B11/06G01N21/55G01N21/59
CPCG01B11/06G01B11/0625G01N21/55G01N21/59G01N2021/558
Inventor 陶利松
Owner GOERTEK OPTICAL TECH CO LTD