Vacuum pressure adjusting device

Abstract

The invention relates to the technical field of semiconductor manufacturing, and discloses a vacuum pressure adjusting device. The vacuum pressure adjusting device includes an outer cavity, an inner cavity is formed in the outer cavity, the inner cavity is fixedly connected with the outer cavity, limited communicating pipes are arranged at the bottom end of the inner cavity, and the limited communicating pipes are fixedly connected with the inner cavity. According to the vacuum pressure adjusting device, the limited communicating pipes which are of a tubular structure with bottom are directlyconnected with the inner cavity, the bottom parts are hollow, and the hollow parts are connected with an outer cavity; a cover plate is a circular thin plate, the cover can cover the hollow parts of the limited communicating pipes, and can move up and down freely; the falling cover plate covers the hollow parts of the limited communicating pipes, the inner cavity and the outer cavity are isolated(or minor leakage may exist ), and the state of the cover plate is related to the pressure difference between the inner cavity and the outer cavity, the hollow area of the limited communicating pipesand the weight of the cover plate; and when the pressure difference is large, the cover plate is pushed to rise, and when the pressure difference is small, the cover plate falls down, so that the internal and external pressure difference is kept constant without changing with the cavity pressure.

Description

technical field [0001] The invention relates to the technical field of semiconductor manufacturing, in particular to a vacuum pressure regulating device. Background technique [0002] Air pressure is the atmospheric pressure acting on a unit area, which is equal to the weight of a vertical air column extending upward to the upper boundary of the atmosphere per unit area. The famous Magdeburg hemisphere experiment proved its existence. The international system unit of air pressure is Pascal. Abbreviated as Pa, the symbol is Pa. According to molecular kinetic theory, the pressure of gas is generated by a large number of molecules frequently colliding with the container wall. The collision time of a single molecule to the container wall is extremely short, and the effect is discontinuous. The force on the wall of the collider is continuous and uniform, and the ratio of this pressure to the area of ​​the wall is the pressure. [0003] At present, the existing air pressure adjus...

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Problems solved by technology

[0004] Aiming at the deficiencies of the prior art, the present invention provides a vacuum air pressure regulating device, which has the advantages that the internal and external pressure difference does not fluctuate with the chamber pressure and can be adjusted and accurately controlled by replacing the cover plate, which solves the problem of the existing air pressure The adjustment device is provided with two limited communication pipes, and the two limited communication pipes are opened and closed by the control valve. The function of the control valve is constantly feedback and adjusted, which can realize the effect that the internal and external pressure difference does not fluctuate with the chamber pressure. However, the structure and control method are relatively complicated, and the gas diffusion rate increases inhomogeneously, resulting in the contamination of the product by impurities in the air. However, when the chamber pressure fluctuates, the constant pressure difference between the inside and outside cannot be achieved, so the air pressure adjustment device is required. make improvement questions

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