Ultrasonic sensor packaging structure
A packaging structure and sensor technology, applied in the measurement of ultrasonic/sonic/infrasonic waves, instruments, measuring devices, etc., can solve problems such as insufficient detection sensitivity, weak transmission and reception signals, and unfavorable piezoelectric ceramic vibrations. To achieve the effect of reducing the amount of glue filling, improving the measurement accuracy and small deformation
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[0020] The packaging structure of the ultrasonic sensor of the present invention is as Figure 1 ~ Figure 3 As shown, it is the same as the prior art in that it also includes a housing 1 and a sensor chip 2 arranged on the front working surface of the inner cavity of the housing 1. The difference is that the package structure also includes a The cavity is pressed against the elastic gasket 3 on the rear surface of the sensor chip 2. Through the arrangement of the elastic gasket 3, it can play a role of vibration, effectively improve the sensitivity of the sensor chip 2, thereby improving the measurement accuracy of the sensor. The elastic gasket 3 can be made of silica gel or other similar materials.
[0021] As an embodiment, the packaging structure further includes a wiring board 4 arranged in the inner cavity of the housing 1 and behind the elastic gasket 3 , the wiring board 4 is used for external signal wires, and is electrically connected to the sensor chip 2 through ena...
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