Vacuum isolating valve and vacuum system provided with same

Abstract

The invention provides a vacuum isolating valve and a vacuum system provided with the same and belongs to the technical field of vacuum valves. The vacuum isolating valve comprises a valve body and avalve seat, wherein the valve body is provided with an opened end suitable for communicating to the outer side wall of a vacuum cavity, and a valve plate suitable for extending toward the vacuum cavity through the opened end is slidably arranged in the valve body; and the valve seat is suitable for being arranged on the inner side wall of the vacuum cavity, is provided with a valve hole suitable for communicating a ventilating hole of the vacuum cavity and is suitable for being matched with the valve plate to close. A moving space of the valve plate is the valve body and the valve cavity, andthe valve plate moves toward and far away from the valve seat to open and close the valve hole. In the moving process of the valve plate, the valve plate is not in contact with outer side, so that fine dust is not lifted, and therefore, it is ensured that a vacuum environment in the vacuum cavity is in a clean state all the time and the vacuum isolating valve can meet higher and more special vacuum demands.

Description

technical field [0001] The invention relates to the technical field of vacuum valves, in particular to a vacuum isolation valve and a vacuum system having the same. Background technique [0002] The vacuum industry has developed into an indispensable part of the industrial system. The vacuum industry is inseparable from the vacuum valve. The general vacuum valve needs to be composed of a driver, a valve body, a valve seat, a valve plate and a sealing ring, and the valve plate is located in the vacuum chamber. the exterior of the room. [0003] The above-mentioned vacuum valve, the valve plate is easy to raise dust during the movement process, which cannot meet the needs of some special vacuum occasions. Contents of the invention [0004] Therefore, the technical problem to be solved by the present invention is to overcome the defect that dust is easily raised during the movement of the valve plate of the vacuum valve in the prior art and cannot meet the vacuum requirement...

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Problems solved by technology

[0004] Therefore, the technical problem to be solved by the present invention is to overcome the defect that dust is easily raised during the movement of the valve plate of the vacuum valve in the prior art and cannot meet the vacuum requirements of some special occasions, thereby providing a vacuum valve that can reduce the Vacuum valve for board dust and its vacuum system

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