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Electron microscope in-situ sample rod with high-resolution multidimensional manipulation and electrical measurement

An electron microscope, high-resolution technology, used in circuits, discharge tubes, electrical components, etc., can solve the problems of inability to meet the needs of high-resolution electron microscopes and limited resolution

Pending Publication Date: 2020-09-01
安徽泽攸科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Aiming at the technical problem that the resolution of the electron microscope manipulation in the prior art is limited and cannot meet the use requirements of the high-resolution electron microscope, the purpose of the present invention is to provide an electron microscope in-situ sample holder with high-resolution multi-dimensional manipulation and electrical measurement

Method used

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  • Electron microscope in-situ sample rod with high-resolution multidimensional manipulation and electrical measurement
  • Electron microscope in-situ sample rod with high-resolution multidimensional manipulation and electrical measurement
  • Electron microscope in-situ sample rod with high-resolution multidimensional manipulation and electrical measurement

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Embodiment 1

[0039] Such as figure 1 As shown, the present invention discloses an in-situ micro area manipulation and physical property measurement scheme based on piezoelectric ceramics and inertial sensing for modern high-resolution electron microscopes.

[0040] The in-situ sample rod 11 of the electron microscope with high-resolution multi-dimensional manipulation and electrical measurement. The end of the sample rod 11 is provided with a rod head body. The rod head body includes a micro-manipulation structure and a probe 9. The manipulation structure is provided with a deformation mechanism and a telescopic mechanism. Mechanism, the deformation mechanism is connected with the probe 9 through the telescopic mechanism;

[0041] The deformation mechanism includes a piezoelectric ceramic sheet group 1 and a base base 10. The base base 10 is made of a non-conductive material to form a hollow cylindrical structure, which has the characteristics of being hollow, non-conductive, suitable for toughn...

Embodiment 2

[0047] Such as figure 1 As shown, on the basis of embodiment 1, it is different from embodiment 1, as figure 1 , Figure 5 with Image 6 As shown, the electron microscope in-situ sample rod 11 with high-resolution multi-dimensional manipulation and electrical measurement is provided with a rod head body at the end of the sample rod 11, and the rod head body includes a micro-manipulation structure and a probe 9, and the manipulation structure is provided with deformation Mechanism, telescopic mechanism and inertial sensing mechanism, the deformation mechanism is connected with the probe 9 through the telescopic mechanism;

[0048] The inertial sensing mechanism is arranged in a spherical gravity block structure, and the spherical gravity block is firmly connected to the outer end of the slider.

[0049] The inertial sensing mechanism is sequentially provided with a copper cap 8, a metal claw 7 and a gravity ball 6. The probe 9 is connected to the copper cap 8 in a detachable manner,...

Embodiment 3

[0055] On the basis of embodiment 1 or 2, different from embodiment 1 or 2, such as figure 1 , Figure 5 with Image 6 As shown, the in-situ sample rod 11 of the electron microscope with high-resolution multi-dimensional manipulation and electrical measurement is provided with an outer frame 13 on the outside of the head body and installed at the end of the sample rod 11 through the outer frame 13. The outer frame 13 and the head The probe 9 of the body is correspondingly provided with a sample loading area, such as Figure 5 As shown, the sample loading area is facing the micro-manipulation structure. The loading area can be a conductive needle or a semi-copper mesh structure. This depends on whether the selected sample is a nanowire, a nanoparticle, or a block or film. A circuit structure is printed on the outer frame 13, one end of the circuit is electrically connected to the sample area 12, and the other end of the circuit passes through the shaft of the sample rod 11 throug...

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Abstract

The invention discloses an electron microscope in-situ sample rod with high-resolution multidimensional manipulation and electrical measurement, which is characterized in that a rod head body comprises a micro manipulation structure and a probe, the manipulation structure comprises a deformation mechanism, a telescopic mechanism and an inertia sensing mechanism arranged to be of a spherical gravity block structure, and the deformation mechanism is connected with the probe through the telescopic mechanism; each pair of piezoelectric ceramic patches of a piezoelectric ceramic patch group of thedeformation mechanism is symmetrically and fixedly attached to the side wall of a substrate base, and piezoelectric ceramic patches are arranged at the bottom of the substrate base; a sliding block band a gasket of the telescopic mechanism slide relatively in the axis direction of the sliding block a in a synchronous manner. Besides physical property measurement on a designated position, the electron microscope in-situ sample rod can also be used as a three-dimensional nano manipulator, and accurate operations such as in-situ welding of two nanowires, in-situ compression of an experimental sample and in-situ preparation of a heterojunction are realized in the TEM. The overall structural design can improve the resolution ratio of operation, and is beneficial to prolonging the service lifeof equipment.

Description

Technical field [0001] The invention belongs to the technical field of nanometer material measurement, and relates to the research field of electronic microscope accessories and nanometer material in-situ measurement, and specifically relates to an electronic microscope in-situ sample rod with high-resolution multi-dimensional manipulation and electrical measurement. Background technique [0002] Modern electron microscopes can magnify samples millions of times. Observing samples on nanometer or even picometer scales is an indispensable modern scientific instrument. The introduction of external fields is one of the future development trends of electron microscopy. For example, thermal field, electric field, magnetic field, force field, light field, electrochemical field, etc. are applied to the sample, and the in-situ observation is carried out to develop the structure-performance of the material. Relationship research has important guiding significance. With the development of ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J37/20H01J37/26H01J37/28
CPCH01J37/20H01J37/26H01J37/28H01J2237/202H01J2237/20264
Inventor 许智
Owner 安徽泽攸科技有限公司
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