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Photoelectric conversion device, imaging system and mobile device

A technology of photoelectric conversion and equipment, which is applied to components of TV systems, radiation control devices, TVs, etc., and can solve problems that do not consider the relationship between position and function

Pending Publication Date: 2020-09-01
CANON KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, neither in Japanese Patent Application Laid-Open No. 2018-157387 nor in Japanese Patent Application Laid-Open No. 2011-53519 focuses on the relationship between position and function in the thickness direction of the substrate.

Method used

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  • Photoelectric conversion device, imaging system and mobile device
  • Photoelectric conversion device, imaging system and mobile device
  • Photoelectric conversion device, imaging system and mobile device

Examples

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no. 1 example

[0050] A photoelectric conversion device according to a first embodiment will be described. As one example, the photoelectric conversion device of the present embodiment is assumed to be an imaging device for capturing an image. The photoelectric conversion device of this embodiment has one or more pixels, and each pixel includes one or more avalanche diodes. The conductivity type of charges used as signal charges in a pair of charges generated by the avalanche diode is referred to as a first conductivity type. In addition, a conductivity type opposite to the first conductivity type is referred to as a second conductivity type.

[0051] figure 1 is a schematic cross-sectional view of the avalanche diode according to the present embodiment. The avalanche diode of the present embodiment is arranged in a semiconductor substrate 15 (first substrate). The semiconductor substrate 15 has a first surface and a second surface opposite to the first surface. For example, the first f...

no. 2 example

[0089] A photoelectric conversion device according to a second embodiment will be described. In the description of the present embodiment, features having the same functions as those of the first embodiment are denoted by the same reference numerals, and detailed descriptions thereof may be omitted or simplified.

[0090] Figure 6 is a block diagram of the photoelectric conversion device 10 according to the present embodiment. The photoelectric conversion device 10 has a pixel unit 106 , a control pulse generation unit 109 , a horizontal scanning circuit 104 , a column circuit 105 , a signal line 107 , an output circuit 108 , and a vertical scanning circuit 103 .

[0091] The pixel unit 106 has a plurality of pixels 100 arranged to form rows and columns. Each pixel 100 includes a photoelectric conversion element 101 and a pixel signal processing unit 102 . The photoelectric conversion element 101 converts light entering the photoelectric conversion device 10 into an electr...

no. 3 example

[0119] A photoelectric conversion device according to a third embodiment will be described. In the description of the present embodiment, features having the same functions as those of the first embodiment or the second embodiment are denoted by the same reference numerals, and a detailed description thereof may be omitted or simplified.

[0120] The photoelectric conversion device of the present embodiment is a device in which the photoelectric conversion device of the second embodiment is applied to a back-illuminated photoelectric conversion device. Figure 10 is a schematic cross-sectional view of the photoelectric conversion device according to the present embodiment. Figure 10 are color filters CF1 and CF2 as well as microlenses ML are added along the Figure 8A , Figure 8B and Figure 8C An illustration of a schematic cross-sectional view taken along the line SL1-SL1'. Such as Figure 10 As shown, the color filters CF1 and CF2 and the microlens ML are arranged on...

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PUM

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Abstract

The invention discloses a photoelectric conversion device, an imaging system and a mobile device. The photoelectric conversion device includes a first substrate having a first surface; photodiodes disposed in the first substrate, wherein each photodiode has a first region that generates a signal charge by photoelectrically converting the incident light and a second region that receives the signalcharge moving from the first region; a first isolation region disposed in the first substrate at a first depth and including a first portion extending in a first direction so as to isolate the secondregions from each other; and a second isolation region disposed in the first substrate at a second depth deeper than the first depth from the first surface and including a second portion extending ina second direction intersecting the first direction in plan view so as to isolate the first regions from each other, and the first portion and the second portion partially overlap each other in plan view.

Description

technical field [0001] The present invention relates to photoelectric conversion devices, imaging systems and mobile devices. Background technique [0002] Avalanche diodes are known that can detect weak light at the single photon level by using avalanche (electron avalanche) multiplication. Japanese Patent Application Laid-Open No. 2018-157387 discloses an imaging device configured such that a plurality of avalanche diodes are arranged in a single pixel. [0003] Also, an image sensor having a plurality of photoelectric conversion units for image plane phase difference autofocus in each pixel is known. In such an image sensor, when a subject has a fringe pattern or the like in which parallax is less likely to occur, the accuracy of autofocus may decrease. Japanese Patent Application Laid-Open No. 2011-53519 discloses a technique for improving focus detection accuracy by using two alignment directions of focus detection pixels. [0004] In a photoelectric conversion devic...

Claims

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Application Information

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IPC IPC(8): H01L27/146
CPCH01L27/14643H01L27/14605H01L27/1463H01L27/14645H01L27/14607H01L27/1461H01L27/1464H01L27/14627H01L27/14621H01L27/14641H04N25/76H04N25/134H04N25/773G06T2207/30252G06T7/55
Inventor 乾文洋岩田旬史池田一福田浩一冈本康平
Owner CANON KK
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