Image feedback multi-MEMS device piezoelectric automatic pick-and-place robot and control method thereof

Abstract

The invention belongs to the field of a micro-electromechanical integration technology and a micro-nano technology, and particularly relates to an image feedback multi-MEMS device piezoelectric automatic pick-and-place robot and a control method thereof. The robot comprises a base platform, wherein a circumferential rotation unit, an automatic pick-and-place device, a piezoelectric adjustable sample table and a liftable image detection unit are sequentially fixed on the base platform from left to right, the automatic pick-and-place device can smoothly pick up MEMS devices arranged on the circumferential rotation unit through cooperation among the circumferential rotation unit, the automatic pick-and-place device, the piezoelectric adjustable sample table and the liftable image detection unit, the MEMS devices are transferred to the piezoelectric adjustable sample table, and the robot has the advantages of automation in operation, high pick-and-place precision and high efficiency.

Description

technical field [0001] The invention belongs to the fields of micro-electromechanical integration technology and micro-nano technology, and in particular relates to an image feedback piezoelectric automatic pick-and-place robot with multiple MEMS devices and a control method thereof. Background technique [0002] Micro-electromechanical systems (MEMS) devices, as an important common test device in the field of micro-nano-level testing, are widely used in the fields of micro-nano operation and measurement due to their relatively high test efficiency, high test accuracy, and high sensitivity. Generally speaking, according to different test tasks and application requirements, there will be situations where different functional MEMS devices need to be replaced multiple times. Therefore, the pick-and-place operation of MEMS devices has become a decisive link to ensure the normal operation of MEMS devices. At present, the commonly used pick-and-place method for replacing MEMS devi...

AI Technical Summary

Problems solved by technology

At present, the commonly used pick-and-place methods for replacing MEMS devices are mostly manual methods. Although the purpose of pick-and-place can be achieved, due to the small size of the MEMS devices themselves, they are easily damaged during use, especially when the MEMS devices need to be picked and placed many times by hand. The probability of man-made damage is uncertain, which is not only time-consuming and labor-intensive, but also costly

In addition, manual pick-and-place replacement of multiple MEMS devices has problems such as low efficiency, poor pick-and-place effect, and low precision. Especially in some special occasions such as the occasions where the replacement time is strictly limited, it cannot meet complex research tasks to quickly perform multiple MEMS devices. Special requirements for accurate pick and place replacement

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