Non-dispersive infrared gas sensor
A gas sensor and non-spectral infrared technology, applied in the field of sensors, can solve the problems of reduced light confinement performance, affecting response time, affecting sensor signal-to-noise ratio, etc., to solve the contradiction between gas diffusion speed and light confinement ability, and high utilization efficiency Effect
Pending Publication Date: 2020-09-29
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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Problems solved by technology
If the opening of the vent hole is large, the confinement performance of the cavity to light will be reduced, and the light leakage will be serious; if the vent hole is opened small, the gas diffusion will be very slow, which will seriously affect the response time
In addition, in the traditional differential structure, two detectors are placed side by side, so that the place with the strongest light energy at the position of the two detectors cannot be used, thus affecting the signal-to-noise ratio of the sensor
Method used
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[0048] In order to make the purpose, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings. Obviously, the described embodiments are only some of the embodiments of the present invention, rather than all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0049] The embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings.
[0050] An embodiment of the present invention provides a non-spectral infrared gas sensor, such as figure 1 shown, including:
[0051] The porous cavity 103 includes a cavity surface and two ends connected to the cavity surface, wherein the cavity surface contains a plurality of vent holes 102 to re...
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The present invention discloses a non-dispersive infrared gas sensor. The sensor comprises a porous cavity, an infrared light emitting component and an infrared light receiving part, wherein the porous cavity includes a cavity surface and two ends connected to the cavity surface, the cavity surface includes a plurality of air vents, and the two ends are provided with through holes; a collimating lens is packaged on the infrared light emitting component so that emitted light is emitted in parallel after passing through the collimating lens; and the infrared light receiving part includes two detectors, and the two detectors are vertically packaged with each other. The sensor has advantages that the collimating lens is used for converging light beams, and a detector chip is vertically packaged so that a light energy utilization rate of an infrared absorption type sensor is greatly improved; and performance of the sensor is greatly improved while single-light-source double-light-path differential measurement is realized, and the size of the sensor is reduced. The sensor is especially suitable for occasions with high detection precision and requirements on the safety of the sensor.
Description
technical field [0001] The invention relates to the technical field of sensors, in particular to a non-spectral infrared gas sensor, in particular to a non-spectral infrared gas sensor based on an infrared light-emitting diode. Background technique [0002] The non-dispersive infrared (NDIR) gas sensor uses a wide-spectrum light source as the light source of the infrared sensor. The light passes through the measured gas in the optical path, passes through a narrow-band filter, and reaches the infrared detector. Its working principle is based on the characteristics of different gas molecules absorbing infrared light of specific wavelengths, using the relationship between gas concentration and absorption intensity (Lambert-Beer law) to identify gas components and determine their concentration. With the development of infrared light source, sensor and electronic technology, non-dispersive infrared (NDIR) gas sensor has been developed rapidly at home and abroad. [0003] The ma...
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IPC IPC(8): G01N21/3504G01N21/01
CPCG01N21/01G01N21/3504
Inventor 钱利滨王永杰施安存李芳
Owner INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI