Automatic wafer loading equipment for quartz wafer production
A quartz wafer and wafer loading technology, applied in the directions of transportation and packaging, conveyor objects, electrical components, etc., can solve the problems of offset, low wafer loading accuracy, slow replacement of wafer loading molds, etc., to achieve high controllability, improve The effect of high production efficiency and high precision
Pending Publication Date: 2020-11-06
马鞍山荣泰科技有限公司
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Problems solved by technology
[0003] Nowadays, most of the quartz wafers on the market need to be manually loaded during production and loading, which affects production efficiency. It is easy to cause the problem of low loading accuracy
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[0023] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0024] see Figure 1-4 , an automatic loading device for quartz wafer production, comprising a moving mechanism 1 and a loading mechanism 2, the loading mechanism 2 is installed on one side of the moving mechanism 1, and the moving mechanism 1 includes a body 11, a workbench 12, a support frame 13, and guide rails 14 and slide block 15, workbench 12 is installed on the upper side of body 11, support frame 13 is installed on the both sides of body 11 and film l...
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The invention discloses automatic wafer loading equipment for quartz wafer production. The equipment comprises a moving mechanism and a wafer loading mechanism, the wafer loading mechanism is mountedon one side of the moving mechanism; when a sucking disc assembly sucks up a quartz wafer through an air suction nozzle, the sucking disc assembly translates on the surface of a guide rail through a sliding block, moves to the upper ends of a supporting table and a wafer loading mold, and is lifted through a telescopic rod; when a quartz wafer is placed in a positioning groove and mounted and thewafer loading mold is full, people at the outer end can hold a handle; the wafer loading mold is pulled out and replaced through a chute; and during replacement, a protruded block can slide in the sliding groove. The limiting piece and the rubber plate can be attached to the buffer block for limiting when the sucking disc assembly moves to the upper end of the wafer loading mold, so that the sucking disc assembly can locate and fall a quartz wafer into the positioning groove, the installed abutting block can conduct abutting limiting when the wafer loading mold is replaced and installed, and the precision of overall production wafer loading is higher.
Description
technical field [0001] The invention relates to the technical field of quartz wafer production, in particular to an automatic loading device for quartz wafer production. Background technique [0002] The processing process of the quartz wafer is to first cut the crystal ingot into individual quartz wafers, and then package these quartz wafers into semiconductor wafers. [0003] Nowadays, most of the quartz wafers on the market need to be manually loaded during production and loading, which affects production efficiency. It is easy to cause the problem of low loading accuracy. [0004] In view of the above-mentioned problems, in order to improve the production efficiency of the film loading equipment, the regulation and control of the film loading and the film loading accuracy. For this reason, an automatic loading device for quartz wafer production is proposed. Contents of the invention [0005] The object of the present invention is to provide an automatic loading devi...
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Login to View More IPC IPC(8): H01L21/683H01L21/677
CPCH01L21/67766H01L21/67781H01L21/6838
Inventor 李直荣温从众陈高雄
Owner 马鞍山荣泰科技有限公司