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Distance sensor pixel array structure, distance sensor and working method

A distance sensor and pixel array technology, applied in the sensor field, can solve the problems of image blurring, distance error, resolution reduction, etc., and achieve the effect of reducing pixel pitch, improving crosstalk and improving resolution.

Pending Publication Date: 2020-12-04
上海大芯半导体有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Compared with the image sensor or I TOF, the crosstalk of DTOF will cause false triggering of adjacent spads, which will directly cause the image to be blurred, instead of only bringing distance errors or resolution reduction.
Therefore, the current pixel pitch of D TOF is very large, such as 20 μm, 30 μm, etc., resulting in low resolution

Method used

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  • Distance sensor pixel array structure, distance sensor and working method
  • Distance sensor pixel array structure, distance sensor and working method
  • Distance sensor pixel array structure, distance sensor and working method

Examples

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Embodiment 1

[0035] Embodiment 1 of the present invention provides a distance sensor pixel array structure. The implementation details of this embodiment are described in detail below, and the following content is only implementation details provided for easy understanding, and is not necessary for implementing this solution. The schematic diagram of this embodiment can refer to Figure 5 ,include:

[0036] A plurality of pixel units 101 , 102 , 103 , 104 are arranged in an array, each pixel unit includes a single photon avalanche diode (not shown), and adjacent pixel units work in time-division.

[0037] Therefore, in the embodiment of the present invention, by making the pixel unit have the characteristic of time-sharing operation of adjacent pixel units, the spacing is reduced, and crosstalk and false triggering are avoided when the spacing is small.

Embodiment 2

[0039] Embodiment 2 of the present invention provides a distance sensor pixel array structure, which may be further optimized or improved on the basis of Embodiment 1. The implementation details of this embodiment are described in detail below, and the following content is only implementation details provided for easy understanding, and is not necessary for implementing this solution. This example includes:

[0040] The distance between adjacent pixel units is less than or equal to 5 μm, for example, the distance between adjacent pixel units may be 1 μm, 2 μm, 3 μm, 4 μm and so on. It can be seen that the pitch in the prior art is above 20 μm, so the present invention greatly reduces the pitch.

[0041] It can be understood that, for the case where the distance between adjacent pixel units is 5-20 μm, or even greater than 20 μm, the embodiments of the present invention can also be implemented. Those skilled in the art can flexibly adjust the spacing between adjacent pixel un...

Embodiment 3

[0043]Embodiment 3 of the present invention provides a distance sensor pixel array structure, which may be further optimized or improved on the basis of Embodiment 1 or Embodiment 2. The implementation details of this embodiment are described in detail below, and the following content is only implementation details provided for easy understanding, and is not necessary for implementing this solution. The schematic diagram of this embodiment can refer to Figure 5 ,include:

[0044] In this embodiment, pixel units in adjacent i rows and j columns constitute a group of pixel units 10 , and the pixel array structure of the distance sensor includes the plurality of groups of pixel units 10 .

[0045] For example, each group of pixel units 10 is a combination of 2×2 pixel units.

[0046] Typically, each group of pixel units is the same array.

[0047] In addition, each group of pixel units 10 may also be in other array forms, such as 2×3, 3×3 and so on. In this embodiment, the a...

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Abstract

The invention discloses a distance sensor pixel array structure, a distance sensor and a working method. The distance sensor pixel array structure comprises a plurality of pixel units arranged in an array, wherein each pixel unit comprises a single-photon avalanche diode, and the adjacent pixel units work in a time-sharing manner, so that the single-photon avalanche diodes at the corresponding positions can be sequentially turned on in a time-sharing manner during working, and when a certain pixel unit works, its up, down, left and right adjacent pixel units are in a non-working state, so thatcrosstalk is difficult to reach another pixel unit which is in a working state, the crosstalk condition is improved, and false triggering is avoided. Based on the distance sensor pixel array structure, the distance between the adjacent pixels is reduced, so that the resolution ratio can be greatly improved.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to a distance sensor pixel array structure, a distance sensor and a working method. Background technique [0002] The D TOF (Direct Time of Flight) distance sensor is based on the avalanche trigger of the spad (One Photon Avalanche Diode). When the resolution is high, the pixel pitch (adjacent pixel pitch) needs to be very small, such as 1 μm, 2.5 μm, 3.5 μm, 5 μm, 10 μm, etc. Small pixel pitches are easily affected by crosstalk between adjacent pixels. [0003] When the pixel pitch is lowered, the crosstalk will increase rapidly. Compared with the image sensor or I TOF, the crosstalk of DTOF will cause false triggering of adjacent spads, which will directly cause the image to be blurred, instead of only bringing distance errors or resolution reduction. Therefore, the pixel pitch of the current D TOF is very large, such as 20 μm, 30 μm, etc., resulting in low resolution. [0004]...

Claims

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Application Information

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IPC IPC(8): H01L27/146G01S7/481G01S7/4865G01S17/08
CPCH01L27/14643G01S7/4865G01S7/4816G01S17/08
Inventor 东尚清
Owner 上海大芯半导体有限公司