Heterodyne two-dimensional grating displacement measurement system and measurement method
A two-dimensional grating and displacement measurement technology, applied in the direction of measuring devices, optics, optical components, etc., can solve the problems of the influence of measurement accuracy and the complex optical structure of the measurement system, and achieve the effect of convenient application, small size and simple structure
Active Publication Date: 2022-07-22
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology
The traditional grating displacement measurement system uses single diffraction to achieve 2 times optical subdivision. In order to further improve optical subdivision, the existing technology mostly uses the principle of secondary diffraction to achieve 4 times optical subdivision or multiple diffractions to achieve higher multiples of optical subdivision , but whether it is secondary diffraction or multiple diffraction will make the optical structure of the measurement system more complex, and multiple diffraction uses the diffracted light at different positions of the grating, the surface accuracy of the grating and the attitude error between the grating and the reading head will be greatly reduced have a great impact on measurement accuracy
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[0040] In order to make the objectives, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention, but not to limit the present invention.
[0041] The heterodyne two-dimensional grating displacement measuring system and measuring method provided by the present invention is that the two-dimensional measuring grating is fixed on the measured object as a scale for displacement measurement. When the two-dimensional measuring grating moves with the measured object, the two The displacement measurement of the dimensional measurement grating realizes the displacement measurement of the measured object.
[0042] In order to solve the problem of achieving 4 times or higher optical subdivision through 2nd or more times of diffr...
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The present invention provides a heterodyne two-dimensional grating displacement measurement system and a measurement method, wherein the method includes: S1, generating two linearly polarized lights with overlapping, orthogonal polarizations and a fixed frequency difference through a light source; S2, two linearly polarized beams The light is incident on the surface of the two-dimensional grating through the reading head to generate the first-dimension ±1st-order diffracted light and the second-dimension ±1st-order diffracted light respectively, and then respectively enters the photoelectric receiving module through the reading head; The one-dimensional ±1st-order diffracted light and the second-dimension ±1st-order diffracted light generate corresponding beat frequency signals and send them to the signal processing system; S4, the signal processing system respectively generates the beat-frequency signals and the second-dimensional ±1st-order diffracted light Differential calculation is performed on the beat frequency signals generated by the second-dimension ±1st-order diffracted light, so as to realize the displacement measurement of the 4-fold optical subdivision of the first-dimension and the second-dimension of the two-dimensional grating. The invention can avoid the influence of the grating surface shape accuracy and the grating attitude error on the measurement accuracy.
Description
technical field [0001] The invention relates to the technical field of precise displacement measurement, in particular to a heterodyne two-dimensional grating displacement measurement system and a measurement method based on single diffraction to realize 4 times optical subdivision. Background technique [0002] The grating displacement measurement system uses the grating as the measuring ruler and the grating pitch as the measurement benchmark. Compared with the laser measurement technology, the grating measurement is less sensitive to environmental changes, and the light beam incident on the grating will cover many grooves, which plays a role in the measurement of the grating. average effect. The structure of the reading head in the grating displacement measurement system is simple and compact, the distance between the grating and the reading head is very small, and does not increase with the increase of the distance to be measured, which can greatly reduce the influence o...
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IPC IPC(8): G01B11/02G02B27/28
CPCG01B11/02G02B27/283G01D5/38G02B26/0808G01D5/266G02B27/285G01B9/02003
Inventor刘兆武李文昊吉日嘎兰图于宏柱王玮姚雪峰尹云飞
OwnerCHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI