A Pirani vacuum gauge system
A Pirani and vacuum gauge technology, applied in the field of Pirani vacuum gauge systems, can solve the problem of inability to achieve high sensitivity and wide range of Pirani vacuum units, and achieve wide range and high sensitivity vacuum measurement and high sensitivity. Effect
Active Publication Date: 2021-06-08
WUXI INNOVATION CENT CO LTD
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Problems solved by technology
[0004] The invention provides a Pirani vacuum gauge system, which solves the problem that the high sensitivity and wide range of the Pirani vacuum unit cannot be realized in the related art
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[0026] It should be noted that, in the case of no conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and examples.
[0027] In order to enable those skilled in the art to better understand the solutions of the present invention, the following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only Embodiments of some, but not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present invention.
[0028] It should be noted that the terms "f...
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The invention relates to the technical field of vacuum pressure measurement, and specifically discloses a Pirani vacuum gauge system, which includes: a Pirani vacuum array, a switch control array, a signal processing module and a power supply, a Pirani vacuum array and a switch control array connection, the signal processing module is connected with the switch control array, and the power supply is respectively connected with the Pirani vacuum array, the switch control array and the signal processing module; the Pirani vacuum array includes a plurality of Pirani vacuum units; the switch control array is used to The type controls the connection mode between the Pirani vacuum units; the signal processing module is used to convert the voltage value corresponding to the vacuum degree output by the Pirani vacuum array to obtain the corresponding vacuum degree; the power supply is used to supply the Pirani vacuum Arrays, switch control arrays, and signal processing modules provide the voltage or current required to do the work. The Pirani vacuum gauge system provided by the invention can realize vacuum degree measurement with wide range and high sensitivity.
Description
technical field [0001] The invention relates to the technical field of vacuum pressure measurement, in particular to a Pirani vacuum gauge system. Background technique [0002] A microelectromechanical system (MEMS) Pirani vacuum gauge is a thermal conductivity vacuum sensor based on the Pirani effect. Range and sensitivity are the two main performance indicators of MEMS Pirani vacuum gauges. The range determines the range of vacuum that the sensor can measure; the sensitivity determines the ability of the sensor to detect weak changes in vacuum. [0003] In order to achieve wide-range and high-sensitivity measurement, the existing work mainly focuses on improving the single unit structure design and adopting the combined Pirani vacuum system. The single Pirani vacuum system extends the upper or lower limit of the measurement range by changing the structure of the device for a single Pirani vacuum unit, but this type of system cannot simultaneously expand the upper and low...
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IPC IPC(8): G01L21/00
CPCG01L21/00
Inventor 冯万进傅剑宇周琼刘超侯影黄鹏张剑陈大鹏
Owner WUXI INNOVATION CENT CO LTD