Annular silicon gyroscope structure, manufacturing process thereof and silicon gyroscope sensor

Abstract

The invention relates to the technical field of gyroscopes, in particular to an annular silicon gyroscope structure, a manufacturing process of the annular silicon gyroscope structure and a silicon gyroscope sensor. In the annular silicon gyroscope structure, the piezoelectric structure is arranged on the side surface of the silicon ring, and the area of the side surface of the silicon ring is larger than that of the top surface, so that the coverage area of the piezoelectric structure is larger, and the driving capability and the detection capability of the piezoelectric structure are furtherimproved.

Description

technical field [0001] The invention relates to the technical field of gyroscopes, in particular to an annular silicon gyroscope structure, its manufacturing process and a silicon gyroscope sensor. Background technique [0002] Silicon gyroscope sensors have been widely used in military, industrial, automotive and consumer markets in recent years due to their small size and low cost. There is a resonator inside the silicon gyroscope sensor. In the working state, the resonator is in a resonant state. When there is an angular velocity of the axis to be measured, the resonant velocity of the resonator and the angular velocity together generate a Coriolis force, so that the angular velocity of the resonator can be detected The electrodes generate a signal related to the angular velocity from which the angular velocity is calculated. [0003] Silicon ring gyroscope is a kind of silicon gyroscope sensor, which has the characteristics of strong impact resistance and is often used ...

AI Technical Summary

Problems solved by technology

At present, most of the silicon ring gyroscopes that have been commercialized use the electrostatic driving capacitance detection method. This method generally does not need to use other materials except silicon, and the manufacturing process is simple. However, its driving force is relatively small and requires high vacuum packaging. Disadvantages; at the same time, the detection signal of this method is also relatively small, and the signal-to-noise ratio is relatively low

[0004] In the existing ring gyro structures based on piezoelectric thin films, piezoelectric thin films are generally fabricated on the upper surface of the ring structure, and the inverse piezoelectric and piezoelectric effects are used to drive and detect the vibration of the ring structure. Compared with electrostatic drive and capacitive detection, this method The method has strong driving ability and large detection signal; however, since the piezoelectric material is located on the surface of the ring structure, the driving and detection capabilities will be significantly limited

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