Optical proximity correction method
A technology of optical proximity correction and optical simulation, applied in optics, originals for opto-mechanical processing, instruments, etc., and can solve problems such as OPC graphics correction errors
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[0031] Please refer to figure 1 , in the prior art, OPC software is used to correct the OPC graphics of the memory chip, and after the OPC graphics are rasterized, the corrected graphics are obtained through correction. figure 1 Among them is a specific pattern in the memory chip, and its rasterized corrected pattern 104 is obtained after correction in the prior art, and optical simulation is performed on the corrected pattern 104 after rasterized correction to obtain a rasterized corrected pattern 104 Analog Graphics 102; however in figure 1 The target simulation figure 101 is the final figure required for optical simulation after correction. Compared with the target simulation figure 101 after rasterization correction, it can be seen that there is a slight deviation in the rasterization correction simulation figure 102 , it is due to correction errors in the rasterized corrected corrected graphic 104 that the rasterized corrected simulated graphic 102 deviates, and the targ...
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