Vacuum ultraviolet light internal ionization mass spectrometry device and mass spectrometry method
A technology of vacuum ultraviolet light and spectrum analysis, which is applied in the field of mass spectrometry analysis. It can solve the problems of improving the detection sensitivity of mass spectrometry and the detection limit cannot be realized, the pulse stability of vacuum ultraviolet light is difficult, and the timing control is unstable, so as to avoid the background noise Effects of signal interference, reasonable structure, and cost reduction
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[0055] The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several changes and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention.
[0056] At present, a common mass spectrometry device structure design is as follows: figure 1 As shown, the sample gas molecules escape freely in the vacuum chamber after entering the mass spectrometer, and ionize when passing through the beam generated by the ultraviolet light source 101 to form relatively complete charged particles, which enter the mass analyzer through the charged particle channel in the center of the ion trap. In this common design, because the light source in the vacuum ultraviolet...
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