Spiral curved surface shape error measurement method based on dual-optical-path synchronous phase shift interference

A helical surface, synchronous phase shift technology, applied in the field of optical measurement, can solve the problems of helical surface shape error, inability to achieve full field measurement, low precision, etc., to achieve a large measurement range, increase anti-interference ability, and simplify the operation process

Active Publication Date: 2021-01-26
XIAN UNIV OF TECH
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Problems solved by technology

[0004] The purpose of the present invention is to provide a method for measuring the shape error of a helical curved surface based on dual optical path synchronous phase-shift interference, which solves the problems of low precision and inability to realize full-field measurement existing in the prior art

Method used

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  • Spiral curved surface shape error measurement method based on dual-optical-path synchronous phase shift interference
  • Spiral curved surface shape error measurement method based on dual-optical-path synchronous phase shift interference
  • Spiral curved surface shape error measurement method based on dual-optical-path synchronous phase shift interference

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Embodiment 1

[0050] A method for measuring the shape error of a helical curved surface not based on dual-optical-path synchronous phase-shift interference, specifically implemented according to the following steps:

[0051] Step 1. Place the object to be measured between the front wedge 8 and the rear wedge 9 in the interferometric optical path, and adjust the interferometric optical path. When the interferometric optical path is adjusted properly, the CCD camera 18 will obtain the measured helicoid interference Striped images such as figure 2 shown;

[0052]Step 2. Extract the wrapping phase of the measured helicoid according to the measured helicoid interference fringe image obtained in step 1 and the measured helicoid interference fringe image obtained in step 2 after changing the incident angle, and perform phase unwrapping. Step 2 uses phase The reciprocal variance quality map guides the unwrapping process, and the phase wrapping number k of each pixel is obtained, thereby obtaining...

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Abstract

The invention discloses a spiral curved surface shape error measurement method based on dual-optical-path synchronous phase shift interference. A front optical wedge and a rear optical wedge are arranged along a measurement optical path. A structured light sensor is arranged along the scanning measurement light path, and a measured object is placed between the front optical wedge and the rear optical wedge. The structured light sensor is introduced into the interference measurement device, and the projected structured light can ensure full-field measurement during measurement of a large-helical-angle complex helical curved surface through relative movement with the surface of a measured object in the measurement process and in combination with interference measurement data. According to the measurement method, the space phase shift technology is introduced into the interference measuring device, a plurality of phase shift interference patterns can be obtained through one-time measuringand shooting, operation process steps are simplified, and the anti-interference capability of the device is improved.

Description

technical field [0001] The invention belongs to the field of optical measurement, and relates to a method for measuring the shape error of a helical curved surface based on double optical path synchronous phase shift interference. Background technique [0002] With the rapid development of optoelectronic technology and people's demand for measurement accuracy, measurement speed and no damage to the measured helicoid in production and life, laser interference, a non-contact measurement method, is used to measure the surface shape error of complex surface parts. has become an important research direction. In this method, the measured physical information is represented by the phase information of the interference fringe image, and the surface shape error of the complex spiral surface is calculated by processing the interference fringe image. [0003] After searching the literature, it is found that the existing measurement methods for the shape error of precision helical surf...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24
CPCG01B11/2441
Inventor 王晛方素平刘健宁连天虹
Owner XIAN UNIV OF TECH
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