Acceleration sensor based on mechanical metamaterial structure

An acceleration sensor and acceleration sensing technology, which is applied in the direction of acceleration measurement using inertial force, can solve the problems of high cost, small range, and low resolution

Pending Publication Date: 2021-01-29
NANJING GAOHUA TECH
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However, there are still defects such as low resolutio

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  • Acceleration sensor based on mechanical metamaterial structure
  • Acceleration sensor based on mechanical metamaterial structure

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[0027] In order to enable those skilled in the art to better understand the technical solutions of the present invention, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. Apparently, the described embodiments are some, not all, embodiments of the present invention. Based on the described embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0028] Such as figure 1 with figure 2 As shown, the present invention provides an acceleration sensor based on a mechanical metamaterial structure. The acceleration sensor includes: a substrate, an acceleration sensing unit arranged on the substrate, at least one strain sensing unit, an anchor point group and a lead group, each strain The sensing units all include mechanical metamaterial structures and elect...

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Abstract

The invention provides an acceleration sensor based on a mechanical metamaterial structure. The acceleration sensor comprises a substrate, an acceleration sensing unit, at least one strain sensing unit, an anchor point group and a lead group, wherein the acceleration sensing unit, the at least one strain sensing unit, the anchor point group and the lead group are arranged on the substrate. Each strain sensing unit comprises a mechanical metamaterial structure and a resistance strain gauge. One end of each mechanical metamaterial structure is connected with the anchor point group through the lead group, and the other end of each mechanical metamaterial structure is connected with the acceleration sensing unit through the lead group so as to receive a single-direction strain generated by theacceleration sensing unit during acceleration motion and convert the single-direction strain into a multi-direction strain; and each resistance strain gauge is connected with the corresponding mechanical metamaterial structure so as to generate the change of the resistance value under the multi-direction strain and measure the acceleration according to the change of each resistance value. The acceleration sensor has the advantages of high sensitivity, a large measurement range, a small measurement error, a novel structure and the like.

Description

technical field [0001] The invention belongs to the technical field of acceleration sensors, in particular to an acceleration sensor based on a mechanical metamaterial structure. Background technique [0002] Acceleration sensors have been regarded as one of the most important representatives of inertial instruments since their introduction, and are widely used in inertial navigation and inertial guidance systems, mainly involving aerospace, vehicle control, high-speed railways, military industry, robots, industrial automation, prospecting, etc. field. With the continuous development of MEMS technology, the acceleration sensor is gradually developing in the direction of miniaturization. The micro-acceleration sensor is a new type of acceleration sensor manufactured by combining integrated circuit technology and MEMS manufacturing technology. Compared with traditional acceleration sensors, MEMS acceleration sensors have the advantages of small size, long life, low cost, ligh...

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Application Information

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IPC IPC(8): G01P15/12
CPCG01P15/12
Inventor 李维平兰之康
Owner NANJING GAOHUA TECH
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