A passive wireless temperature sensor based on a mechanical metamaterial structure

A temperature sensor, passive wireless technology, applied to thermometers, thermometers with directly heat-sensitive electric/magnetic elements, instruments, etc., can solve the problems of large errors, large power consumption, low sensitivity, etc., and achieve low power consumption , small measurement error, and process compatibility

Active Publication Date: 2022-04-22
NANJING FORESTRY UNIV
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  • Abstract
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Problems solved by technology

However, the current temperature sensor still has the defects of low sensitivity, large error and high power consumption

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  • A passive wireless temperature sensor based on a mechanical metamaterial structure
  • A passive wireless temperature sensor based on a mechanical metamaterial structure
  • A passive wireless temperature sensor based on a mechanical metamaterial structure

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Embodiment Construction

[0035] In order to enable those skilled in the art to better understand the technical solutions of the present invention, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. Apparently, the described embodiments are some, not all, embodiments of the present invention. Based on the described embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0036] Such as Figure 1 to Figure 3 As shown, the present invention provides a passive wireless temperature sensor based on a mechanical metamaterial structure, the temperature sensor includes: a substrate 1, and at least one temperature sensing unit (110 / 120) and a strain sensing unit 130 disposed on the substrate 1 , the strain sensing unit 130 includes a mechanical metamaterial structure 14, an LC resonant...

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Abstract

The present invention provides a passive wireless temperature sensor based on a mechanical metamaterial structure. The temperature sensor includes: a substrate, and at least one temperature sensing unit and a strain sensing unit arranged on the substrate. The strain sensing unit includes a mechanical metamaterial structure, an LC A resonant circuit and a plurality of insulating supports; wherein the mechanical metamaterial structure is connected to at least one temperature sensing unit to receive a single-directional strain generated by the temperature sensing unit due to temperature changes, and convert the single-directional strain into multi-directional Strain, the LC resonant circuit is connected to the mechanical metamaterial structure through multiple insulating supports to produce a change in the resonant frequency under multi-directional strain, and to measure the resonant frequency non-contact through mutual inductance coupling to achieve temperature measurement. The invention adopts a passive wireless measurement method, so that the temperature sensor has low power consumption and is easy to measure, and also has the advantages of simple structure, small measurement error, and process compatibility.

Description

technical field [0001] The invention belongs to the technical field of microelectronic devices, and in particular relates to a passive wireless temperature sensor based on a mechanical metamaterial structure. Background technique [0002] A temperature sensor is a sensor that converts changes in ambient temperature into electrical quantities. According to the principle, it can be divided into capacitive, resistive, thermocouple and MEMS temperature sensors. It is widely used in meteorological detection, industrial control, security alarms, etc. field. With the development of MEMS technology, temperature sensors tend to be miniaturized. Micro temperature sensor is a new type of temperature sensor manufactured by MEMS technology. Compared with traditional temperature sensors, micro temperature sensor has the advantages of small size, easy integration, low power consumption, and low cost. It is also indispensable for the realization of the Internet of Everything in an informat...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01K7/00G01K7/34
CPCG01K7/00G01K7/34
Inventor 颜红彦吕忠全马培
Owner NANJING FORESTRY UNIV
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