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A silicon wafer cleaning equipment that is easy to drain

A technology for cleaning silicon wafers and equipment, which is applied to cleaning methods using liquids, lighting and heating equipment, and cleaning methods using tools, etc. It can solve the problems such as the difficulty of cleaning the cleaning liquid in the cleaning case, and achieve the effect of life safety protection

Active Publication Date: 2021-04-02
JIANGSU ASIA ELECTRONICS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Among them, although the silicon wafer cleaning device can control the rise and fall of the fixed bottom plate through the electric push rod, it is convenient for the operator to clean and take out the fixed silicon wafer, but it is difficult to discharge the cleaning liquid in the cleaning machine.

Method used

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  • A silicon wafer cleaning equipment that is easy to drain
  • A silicon wafer cleaning equipment that is easy to drain
  • A silicon wafer cleaning equipment that is easy to drain

Examples

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Embodiment Construction

[0032] The present invention is described in further detail now in conjunction with accompanying drawing. These drawings are all simplified schematic diagrams, which only illustrate the basic structure of the present invention in a schematic manner, so they only show the configurations related to the present invention.

[0033] see Figure 1 to Figure 6 , figure 1 It is a perspective view of a preferred embodiment of a silicon wafer cleaning device that facilitates liquid drainage in the present invention; figure 2 yes figure 1 Partial enlarged view of part A in middle; image 3 yes figure 1 Partial enlarged view of part C in middle; Figure 4 yes figure 1 Partial enlarged view of part B in middle; Figure 5 It is a structural schematic diagram of the optimal embodiment when the support rod of the present invention is at a high place; Image 6 It is a structural schematic diagram of the optimal embodiment when the support bar of the present invention is at a low posit...

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PUM

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Abstract

The invention relates to a silicon wafer cleaning device which is convenient for liquid drainage. It can be inserted between the two adjacent clamping teeth; the bottom mirror of the cleaning pool is provided with two drain pipes, the drain pipe is provided with a drain groove, and the inner side wall of the drain pipe is provided with a block, and above the block is provided with a lifting and lowering pipe. After the end plate slides along the bottom of the cleaning pool to the installation position, push down the support rod at the bottom so that the support rod presses the block, and the block slides down to fit with the stop The block cooperates to block the drainage groove, thereby realizing the closing of the drainage when the end plate is installed, and opening the drainage when the end plate is removed, thereby realizing the non-contact opening and closing of the drainage of the cleaning pool, so as to provide protection for the safety of workers.

Description

technical field [0001] The invention relates to the field of photovoltaics, in particular to a silicon wafer cleaning device which is convenient for liquid drainage. Background technique [0002] Chinese patent, the application number is CN201921925772.0, the application date is 2019.11.11, the publication number is CN210847462U, and the authorization announcement date is 2020.06.26. A silicon wafer cleaning device for a silicon wafer cleaning machine is provided, including a cleaning chassis. The top of the cabinet is provided with cleaning grooves arranged horizontally, and first holes are provided at both ends of the top of the cleaning cabinet, and electric push rods arranged vertically are sleeved on the circumferential inner walls of the two first holes. The tops of the electric push rods are connected with vertically arranged fixed jacking blocks by bolts, and the adjacent ends of the two fixed jacking blocks are connected with horizontally arranged connecting columns...

Claims

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Application Information

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IPC IPC(8): B08B1/00B08B3/02B08B13/00H01L21/67F26B5/14
CPCB08B3/02B08B13/00H01L21/67023H01L21/67034F26B5/14B08B1/12
Inventor 钱诚田晓东冯春
Owner JIANGSU ASIA ELECTRONICS TECH CO LTD