A silicon wafer cleaning equipment that is easy to drain
A technology for cleaning silicon wafers and equipment, which is applied to cleaning methods using liquids, lighting and heating equipment, and cleaning methods using tools, etc. It can solve the problems such as the difficulty of cleaning the cleaning liquid in the cleaning case, and achieve the effect of life safety protection
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0032] The present invention is described in further detail now in conjunction with accompanying drawing. These drawings are all simplified schematic diagrams, which only illustrate the basic structure of the present invention in a schematic manner, so they only show the configurations related to the present invention.
[0033] see Figure 1 to Figure 6 , figure 1 It is a perspective view of a preferred embodiment of a silicon wafer cleaning device that facilitates liquid drainage in the present invention; figure 2 yes figure 1 Partial enlarged view of part A in middle; image 3 yes figure 1 Partial enlarged view of part C in middle; Figure 4 yes figure 1 Partial enlarged view of part B in middle; Figure 5 It is a structural schematic diagram of the optimal embodiment when the support rod of the present invention is at a high place; Image 6 It is a structural schematic diagram of the optimal embodiment when the support bar of the present invention is at a low posit...
PUM
Login to View More Abstract
Description
Claims
Application Information
Login to View More 


