Mixture ratio calculation device
A mixing ratio and calculation technology, applied in the direction of measuring devices, volume flow ratio measurement, instruments, etc., can solve the problem that the oxygen concentration cannot be uniquely determined
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no. 1 example
[0133] Next, the mixing ratio calculation device 2 according to the embodiment of the present invention will be described in more detail with reference to the drawings. Here, the mixing ratio calculating device 2 which calculates the mixing ratio of a mixed fluid composed of three fluids, which is a basic embodiment of the present invention, will be described.
[0134]
[0135] image 3 A is a plan view showing an example of the detection element 100 included in the mixing ratio calculation device 2 of this embodiment. image 3 B is a cross-sectional view showing an outline of the structure of the detection element. The mixing ratio calculating device 2 of the present embodiment and the following embodiments is also configured as a flow measuring device having the function of measuring the flow of the mixed fluid, for example, a gas sensor, a gas flow meter, an oxygen concentrator, and a breath tester are installed on the In other medical and other industrial equipment and...
no. 2 example
[0226] Next, a second embodiment will be described. For the same structures as those of the first embodiment, the same symbols are used so that explanations are omitted.
[0227] The structure of the detection element of this modified example is the same as that of the detection element 100 of the first embodiment.
[0228] In the first embodiment, the heating heater 116 is provided separately from the detection microheater 110 of the detection element 100, but in this embodiment, the detection microheater 110 is assigned the function of the heating heater. That is, the detection microheater 110 for heating the gas to be measured for flow rate detection is also used for heating the gas to be measured for calculation of the mixing ratio.
[0229] In this way, the structure of the detection element can be simplified, so that cost reduction and miniaturization can be achieved. In addition, since the heating for setting the gas to different temperatures and the heating for detec...
no. 3 example
[0231] Next, a third embodiment will be described. The same symbols are used for the same structures as those of the first and second embodiments, and descriptions thereof are omitted.
[0232] The third embodiment is the same as the above-mentioned second embodiment, except that the microheater 110 for detection is also used as the microheater for heating. In this embodiment, the arrangement of the first thermopile 111 and the second thermopile 112 with respect to the detection microheater 110 is changed from the above modification.
[0233] Figure 12 It is a top view schematically showing the outline of the structure of the detection element 200 of this embodiment.
[0234] In the present embodiment, the first thermopile 11 and the second thermopile 112 are arranged at different distances from the microheater 110 for detection. Specifically, the first thermopile 111 and the second thermopile 112 are arranged such that the distance between the first thermopile 111 and the...
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