Production process of electronic grade sulfuric acid and low-temperature evaporation purification absorption device for production

Abstract

The invention discloses a production process of electronic-grade sulfuric acid and a low-temperature evaporation, purification and absorption device for production. The device includes a combined evaporation and purification device and an absorption device. The production method of electronic grade sulfuric acid using the device includes normal temperature absorption conversion, negative pressure low temperature evaporation, low temperature absorption and temperature increasing degassing, wherein the negative pressure low temperature evaporation uses the evaporation purification device And use low-temperature hot water to heat, so that the sulfur trioxide gas will evaporate without boiling; the low-temperature absorption uses the absorption device to absorb the sulfur trioxide gas with ultra-pure water or ultra-pure sulfuric acid at low temperature, and uses the absorption liquid to shock The force and the absorption of sulfur trioxide form a negative pressure in the evaporation purification device to lower the boiling point of liquid sulfur trioxide. The production method and device can ensure the safety of operation while obtaining high-quality electronic-grade sulfuric acid and ensuring the output and efficiency.

Description

technical field [0001] The invention relates to a sulfuric acid production device and process, in particular to a production process of electronic-grade sulfuric acid and a low-temperature evaporation purification absorption device for production, belonging to the technical field of electronic-grade chemical production process and equipment. Background technique [0002] Electronic grade sulfuric acid, also known as ultra-pure sulfuric acid, is an ultra-clean and high-purity reagent, and is the most widely used wet electronic chemical in industry. It is mainly used for cleaning, photolithography, corrosion, etc. of silicon wafers, as well as corrosion and cleaning of printed circuit boards, etc. , can effectively remove particulate impurities, inorganic residues and carbon deposits on wafers and printed circuit boards. [0003] The preparation process of electronic grade sulfuric acid mainly includes rectification method and gas absorption method. The rectification method i...

AI Technical Summary

Problems solved by technology

When using a kettle-type evaporator to centrally heat the sulfur trioxide liquid to be treated, the heating efficiency is relatively slow, and the processing capacity of the sulfur trioxide liquid is generally large. Once an accident occurs, the risk is very high; at the same time, steam is used as the evaporation Medium, while the temperature of steam is high, sulfur trioxide liquid will spit and boil during the evaporation process, its safety is poor, and the energy consumption when using steam is also high

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