A Tri-translational Decoupling Micropositioner Based on Rotating Lever Half-Bridge Amplifier

A technology of positioner and amplifier, which is applied to parts and instruments of instruments, etc., can solve the problems of parasitic displacement coupling error and the size of micro-positioner is not compact enough.

Active Publication Date: 2021-12-24
TIANJIN UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, these amplification mechanisms will cause the size of the micropositioner to be not compact enough, and there will be parasitic displacement and coupling errors

Method used

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  • A Tri-translational Decoupling Micropositioner Based on Rotating Lever Half-Bridge Amplifier
  • A Tri-translational Decoupling Micropositioner Based on Rotating Lever Half-Bridge Amplifier

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Embodiment Construction

[0017] In order to further understand the invention content, characteristics and effects of the present invention, the following examples are given, and detailed descriptions are as follows in conjunction with the accompanying drawings:

[0018] as attached figure 1 As shown, a three-translational decoupling micropositioner based on a rotating lever half-bridge amplifier is fixed on the working platform through the positioning hole 2. The locator of the present invention is composed of two locators (XY locator and Z locator 8 ), large and small, which are formed by wire cutting of plates.

[0019] In order to obtain high rigidity and compact structure, the XY positioners are connected in parallel. The XY positioner as a whole is connected in parallel by four kinematic branch chains, and the four kinematic branch chains are symmetrically arranged to prevent parasitic displacement. At the same time, among the four kinematic branch chains, two of the kinematic branch chains are ...

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Abstract

The invention discloses a three-translational decoupling micro-positioner based on a rotating lever half-bridge amplifier, including an XY positioner and a Z positioner; the Z positioner is embedded in the output end of the XY positioner in series; The XY positioner includes four parallel-connected kinematic branch chains, the four kinematic branch chains are evenly arranged along the circumference of the Z positioner, and, among the four kinematic branch chains, two of the kinematic branch chains are The branch chain is arranged along the X direction, and the other two motion branch chains are arranged along the Y direction; each of the motion branch chains includes a rotary lever half-bridge amplifier for realizing displacement amplification and a parallelogram mechanism for realizing displacement transmission, The output end of the rotary lever half-bridge amplifier is connected with the input end of the parallelogram mechanism, and the output end of the parallelogram mechanism is connected with the Z positioner. The invention has the characteristics of X-direction translation, Y-direction translation and Z-direction translation three degrees of freedom, large stroke, compact structure, strong decoupling ability and the like.

Description

technical field [0001] The invention relates to nano-imaging and nano-processing technology based on a micro-nano positioning mechanism, in particular to a three-translational decoupling micro-positioner based on a rotary lever half-bridge amplifier. Background technique [0002] With the development of semiconductor processing, micro-electromechanical systems, and biological micro-nano operations, micro-nano positioners play an increasingly important role in the field of precision engineering. Among them, the three-translational micro-positioner is the most widely used positioning mechanism. Its performance directly affects the quality and efficiency of micro-nano operations. [0003] The mainstream three-translational micro-positioning platform mainly has two arrangements: series and parallel. The series-parallel platform combining series and parallel combines the advantages of both, and has compact size, load resistance, and high decoupling performance. So its applicatio...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G12B5/00
CPCG12B5/00
Inventor 田延岭马越王福军卢康康张大卫赵效鲁杨明旋
Owner TIANJIN UNIV
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