Micro-fluidic chip film post-bonding air-tightness detection device and method

Abstract

The invention relates to the technical field of air-tightness detection, and discloses a micro-fluidic chip film post-bonding air-tightness detection device and method. A feeding suction cup is arranged on the side face of a feeding air cylinder, the feeding air cylinder is movably connected with the feeding suction cup, the feeding air cylinder is movably connected with a rodless air cylinder, adetection assembly is arranged on the front face of the rodless air cylinder, the detection assembly is fixedly connected with the rodless air cylinder, the detection assembly is movably connected with the feeding suction cup, a discharging assembly is arranged on the front face of the detection assembly, and the discharging assembly is movably connected with the detection assembly. According to the application, the device is additionally provided with a driving device, a pressure head and a detection platform, so that the device can perform detection without manual operation, errors caused bymanual work are reduced, and the detection yield is effectively improved; the feeding suction cup and the rodless air cylinder are additionally arranged on the device, so that the device automatically conducts feeding and discharging, the two hands of an operator are liberated, under high-strength work, the device can still conduct regular feeding and discharging, and the work efficiency is effectively improved.

Description

technical field [0001] The invention relates to the technical field of air tightness detection, in particular to an air tightness detection device and method for a microfluidic chip after film bonding. Background technique [0002] At present, in the field of product manufacturing, whether the air tightness test of the microfluidic chip film is qualified after bonding, but most of the existing air tightness tests require manual visual inspection, and manual inspection is affected by personal subjective consciousness. It is difficult to unify the standard if it is too large. There is a certain degree of visual fatigue in manual visual inspection, which will cause misjudgment and affect the yield rate. Most of the air tightness testing equipment is semi-automatic single-machine operation, which requires manual loading and unloading, which affects work efficiency. [0003] The existing device and method for detecting the air tightness of microfluidic chip membranes after bondin...

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Problems solved by technology

[0007] Aiming at the deficiencies of the prior art, the present invention provides a microfluidic chip membrane-bonded airtightness detection device and method, which solves most of the existing airtightness detections proposed in the above-mentioned background technology. Through manual visual inspection, manual inspection is greatly affected by personal subjective consciousness, and it is difficult to unify the standard. There is a certain degree of visual fatigue in manual visual inspection, which will cause misjudgment and affect the yield rate. Most of the air tightness testing equipment is semi-automatic stand-alone operation , requires manual loading and unloading, which affects work efficiency

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