A dynamic bending adjustment device and a dynamic stable micro-focusing system

An adjustment device and dynamic technology, applied in the application of diffraction/refraction/reflection for processing, nuclear engineering, radiation/particle processing, etc., can solve problems such as insufficient application requirements, large spatial distance of focusing optical systems, etc., to improve stability. performance, optimize structure, and improve consistency

Active Publication Date: 2022-07-19
SHANGHAI INST OF APPLIED PHYSICS - CHINESE ACAD OF SCI +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, due to the large spatial distance of the focusing optical system, spatial stability is very important; in addition, to meet the needs of micro-nano spatial resolution, the grazing incidence mirror needs to be able to adjust the focus spot size to adapt to different samples and methods, and to achieve different scientific experiment purposes. Traditional fixed surface mirrors are no longer adequate for this application

Method used

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  • A dynamic bending adjustment device and a dynamic stable micro-focusing system
  • A dynamic bending adjustment device and a dynamic stable micro-focusing system
  • A dynamic bending adjustment device and a dynamic stable micro-focusing system

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Embodiment 1

[0036] like figure 1 As shown, the embodiment of the present invention provides a dynamic bending adjustment device, which is basically an axisymmetric structure, including a compliance mechanism 1, two micro-displacement drivers 2, two support frames 3, two connecting pieces 4, and two reflectors Mirror holder 6 and grazing incidence mirror 5 . The bottom of the compliance mechanism 1 is provided with two mounting seats 11, such as figure 2 As shown, they are located on both sides of the bottom of the compliance mechanism 1, and each mounting seat 11 is provided with an adjusting plate 12, and the adjusting plate 12 extends vertically upward from the upper surface of the mounting seat 11; On the opposite sides of the top of the mechanism 1, the two connectors 4 are respectively connected with the free ends of the two adjustment plates 12 by screws, and extend in a direction perpendicular to and away from the mounting seat 11, and the two micro-displacement drivers 2 are res...

Embodiment 2

[0047] This embodiment provides a dynamically stabilized micron focusing system, which includes a plurality of the dynamic bending adjustment devices described in the first embodiment, and the multiple dynamic bending adjustment devices are combined together to form a Kirkpatrick-Baez optical focusing system, Montel type optical focusing system or Wolter type focusing optical system.

[0048] like image 3 As shown, that is, a Kirkpatrick-Baez focusing optical system composed of two dynamic press-bending adjusting devices, wherein the two dynamic press-bending adjusting devices are arranged in front of each other and are orthogonal to each other. During use, the grazing incident light in the direction of the arrow is reflected and focused into a line by the grazing incidence mirror of the first dynamic press-bend adjustment device, and then reflected by the grazing-incidence mirror of the second dynamic press-bend adjustment device for a second time. The reflection is focused...

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Abstract

The invention relates to a dynamic bending adjustment device and a dynamic stable micro-focusing system, comprising a compliance mechanism, which is supported on two mounting seats at the bottom thereof, and an adjusting plate extending vertically upward is arranged from the upper surface of the mounting seat; two connecting pieces, which are respectively connected with the free ends of the adjustment plate and extend along the vertical surface away from the mounting seat; two micro-displacement actuators, which are respectively fixed on the two supporting frames and the side walls are respectively in contact with the two connecting pieces; the two mirror holding pieces are respectively fixed on the bottom surfaces of the two mounting bases; the grazing incidence mirrors are respectively clamped at the two ends of the mirror holding pieces and the mounting bases. between. The dynamic bending adjustment device and the dynamic stable micro-focusing system of the present invention apply a tunable bending moment to both ends of the grazing incident reflector by using a compliant mechanism, adjust the curvature radius of the reflector in real time, realize dynamic micro-focusing, and increase the focused spot size and positional stability.

Description

technical field [0001] The invention relates to synchrotron radiation beamline transmission and regulation technology, and more particularly to a dynamic bending regulation device and a dynamic stable micro-focusing system. Background technique [0002] Grazing incidence mirrors are widely used in the field of modern optical technology to deflect and focus X-ray beamlines, especially in the beamlines of synchrotron radiation light sources in large scientific installations. The commonly used mirror focusing modes include toroidal focusing and ellipsoidal focusing. and parabolic focusing, etc. However, due to the large spatial distance of the focusing optical system, spatial stability is very important; in addition, for the needs of micro-nano spatial resolution, the grazing-incidence mirror also needs to be able to adjust the focusing spot size to adapt to different samples and methods, and achieve different scientific experimental purposes. Traditional fixed surface mirrors...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G21K1/06
CPCG21K1/067
Inventor 刘孟廷蒋力李中亮董晓浩李志军王劼
Owner SHANGHAI INST OF APPLIED PHYSICS - CHINESE ACAD OF SCI
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