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Wafer cleaning system

A technology for cleaning systems and wafers, which is applied to cleaning methods using liquids, cleaning methods and appliances, electrical components, etc., which can solve the problems of poor safety of the cleaning system, achieve the effects of less difficulty in control, reduce working steps, and improve safety performance

Pending Publication Date: 2021-04-16
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The invention discloses a wafer cleaning system to solve the problem of poor safety of the cleaning system

Method used

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  • Wafer cleaning system
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Embodiment Construction

[0025] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with specific embodiments of the present invention and corresponding drawings. Apparently, the described embodiments are only some of the embodiments of the present invention, but not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0026] The technical solutions disclosed by various embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0027] Such as Figure 1 ~ Figure 3 As shown, the embodiment of the present invention discloses a wafer cleaning system. The wafer cleaning system is used to clean the wafer. The disclosed clea...

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Abstract

The invention discloses a wafer cleaning system, and the system comprises a feeding control module, a discharging control module, a manipulator control module, a lower computer, a feeding module, a discharging module, a process tank module and a manipulator conveying module. The feeding control module, the discharging control module and the manipulator control module are all in control connection with the lower computer; the feeding module is in control connection with the feeding control module and used for conveying the wafer bearing device to the feeding conveying position from the feeding position; the discharging module is in control connection with the discharging control module and used for conveying the wafer bearing device from the discharging conveying position to the discharging position; the process tank module is located between the feeding module and the discharging module; and the manipulator conveying module is in control connection with the manipulator control module and is used for conveying the wafer bearing device among the feeding conveying position, the process tank module and the discharging conveying position. According to the scheme, the problem that the safety performance of the cleaning system is poor can be solved.

Description

technical field [0001] The invention relates to the technical field of semiconductor chip manufacturing, in particular to a wafer cleaning system. Background technique [0002] In the semiconductor chip manufacturing process, after the wafer completes the relevant etching process, the wafer needs to be cleaned to remove residues on the wafer surface. [0003] In the related art, wafers are often cleaned in a bath, which can clean multiple wafers at the same time. The wafer cleaning system includes a feeder table, a wafer transfer system and a process mechanical clamping device. During the specific working process, the manipulator in the wafer transfer system transfers the wafer on the feeder table to the wafer transfer device, and then passes through the wafer transfer device. After the position is adjusted, the wafer is picked up by the manipulator in the process machinery clamping device, put into the process tank for cleaning, and then returned to the wafer transfer syst...

Claims

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Application Information

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IPC IPC(8): H01L21/677H01L21/67B08B3/04B08B13/00
Inventor 沈培训
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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