A microwave plasma jet excitation device using piezoelectric material

Abstract

This application provides a microwave plasma jet excitation device using piezoelectric material. It aims to realize low-power microwave signals to excite gas into plasma, to excite different gases into plasma, and to make the plasma generated by excitation have better performance. It includes: a shell, a substrate structure, a piezoelectric material, a connector, and an air inlet and an air outlet on the shell; there is a gap between the substrate structure and the piezoelectric material, and the gas entering the air inlet fills the gap; the connection The head is connected to the substrate structure, and the connector is used to input the microwave signal to the substrate structure, so that the microwave signal enters the housing along the signal line of the substrate structure; the size of the gap between the substrate structure and the end of the piezoelectric material changes with the piezoelectric The voltage on the material changes to change the intensity of the electric field formed by the microwave signal in the gap; the gas filled in the gap is excited into normal pressure plasma under the action of the electric field formed by the microwave signal, and the normal pressure plasma exits Port output.

Description

technical field [0001] The invention relates to the technical field of microwave plasma jet excitation, in particular to a microwave plasma jet excitation device using piezoelectric materials. Background technique [0002] With the rapid development of electronic technology, microwave atmospheric pressure plasma is widely used in the fields of surface modification of materials, biomedicine, food preservation, coating, environmental protection, etc. Its advantages lie in that it does not require external vacuum equipment, and the gas temperature is low. High electron density, rich active particles, no pollution to the surrounding environment, high energy utilization rate of the system and long service life. [0003] Common microwave plasma excitation devices are mostly coaxial-based plasma excitation devices, substrate structure-based excitation devices, and the like. However, the structures of these excitation devices are usually fixed and cannot be adjusted dynamically aft...

AI Technical Summary

Problems solved by technology

However, the structure of these excitation devices is usually fixed and cannot be adjusted dynamically after the plasma is excited, and due to reasons such as machining accuracy and the thickness of the gas pipe, the power required for excitation is relatively large

Images