Measurement correction device and measurement correction method

Abstract

The invention discloses a measurement correction device and a measurement correction method. The measurement correction device comprises a bearing unit, a reference unit, a measurement unit and a processing unit; the bearing unit comprises a bearing surface facing one side of the measuring unit; the bearing surface comprises a first area and a second area surrounding the first area; the first area is used for bearing a to-be-measured sample; the second area is used for bearing the reference unit; the reference unit is fixed in the second area of the bearing unit; the reference unit comprises a plurality of positioning marks, and the positioning marks have theoretical position information in the bearing surface; the measuring unit is used for measuring actual position information of at least part of the positioning marks on the bearing surface and transmitting the actual position information to the processing unit; and the processing unit is used for obtaining position correction information of the positioning marks according to the actual position information and the theoretical position information. According to the measurement correction device and measurement correction method provided by the technical schemes, measurement correction errors can be reduced, accurate correction is facilitated, and therefore the measurement accuracy of the position information is improved.

Description

technical field [0001] The embodiments of the present invention relate to the field of measurement technology, and in particular, to a measurement correction device and a measurement correction method. Background technique [0002] The length measuring device is a device for measuring the position information of the sample to be tested. Length measurement equipment usually uses interferometers as position positioning and measurement systems. However, due to the long-term drift of the interferometer itself, and the long-term changes in the mechanical structure inside the length measurement equipment, the accuracy of measuring the length of the substrate will be affected. . To solve this problem, the length measuring equipment needs to be calibrated regularly. The current calibration method is usually as follows: the reference calibration plate is used as the calibration standard, and the reference calibration plate is uploaded to the length measuring equipment for measureme...

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Problems solved by technology

[0003] However, in this calibration method, the size of the reference calibration plate is large and requires multiple human intervention measurements. Not only is there a risk of damage during the uploading, storage and protection of the reference calibration plate, but also the measurement error is high, which easily leads to measurement accuracy. poor

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